3/12/2011	4:56:40 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/12/2011	4:56:40 PM	Recipe started at 4:56 PM
3/12/2011	4:56:40 PM	H2 valve closed
3/12/2011	4:56:40 PM	BCl3 valve closed
3/12/2011	4:56:40 PM	PH3 valve closed
3/12/2011	4:56:40 PM	SiCl4 pre valve closed
3/12/2011	4:56:40 PM	SiCl4 post valve closed
3/12/2011	4:56:40 PM	Main Vac valve closed
3/12/2011	4:56:40 PM	Bypass valve closed
3/12/2011	4:56:40 PM	Bubbler valve closed
3/12/2011	4:56:40 PM	Helium valve opened
3/12/2011	4:56:40 PM	Helium MFC set to  500.000000
3/12/2011	4:56:40 PM	H2 MFC set to  0.000000
3/12/2011	4:56:40 PM	BCl3 MFC set to  0.000000
3/12/2011	4:56:40 PM	PHl3 MFC set to  0.000000
3/12/2011	4:56:40 PM	SiCl4 MFC set to  0.000000
3/12/2011	4:56:40 PM	Bypass solenoid MFC set to  0.000000
3/12/2011	4:56:40 PM	Tube furnace set to 0
3/12/2011	4:58:01 PM	Helium valve closed
3/12/2011	4:58:01 PM	H2 valve closed
3/12/2011	4:58:01 PM	BCl3 valve closed
3/12/2011	4:58:01 PM	PH3 valve closed
3/12/2011	4:58:01 PM	SiCl4 pre valve closed
3/12/2011	4:58:01 PM	SiCl4 post valve closed
3/12/2011	4:58:01 PM	Main Vac valve closed
3/12/2011	4:58:01 PM	Bypass valve closed
3/12/2011	4:58:01 PM	Bubbler valve closed
3/12/2011	4:58:01 PM	Helium MFC set to  0.000000
3/12/2011	4:58:01 PM	H2 MFC set to  0.000000
3/12/2011	4:58:01 PM	BCl3 MFC set to  0.000000
3/12/2011	4:58:01 PM	PHl3 MFC set to  0.000000
3/12/2011	4:58:01 PM	SiCl4 MFC set to  0.000000
3/12/2011	4:58:01 PM	Bypass solenoid MFC set to  0.000000
3/12/2011	4:58:01 PM	Tube furnace set to 0
3/12/2011	4:58:01 PM	Run finished at 4:58 PM
3/12/2011	4:58:02 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/12/2011	5:02:57 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/12/2011	5:02:57 PM	Recipe started at 5:02 PM
3/12/2011	5:02:57 PM	Helium valve closed
3/12/2011	5:02:57 PM	H2 valve closed
3/12/2011	5:02:57 PM	BCl3 valve closed
3/12/2011	5:02:57 PM	PH3 valve closed
3/12/2011	5:02:57 PM	SiCl4 pre valve closed
3/12/2011	5:02:57 PM	SiCl4 post valve closed
3/12/2011	5:02:57 PM	Main Vac valve closed
3/12/2011	5:02:57 PM	Bubbler valve closed
3/12/2011	5:02:57 PM	Bypass valve opened
3/12/2011	5:02:57 PM	Helium MFC set to  0.000000
3/12/2011	5:02:57 PM	H2 MFC set to  0.000000
3/12/2011	5:02:57 PM	BCl3 MFC set to  0.000000
3/12/2011	5:02:57 PM	PHl3 MFC set to  0.000000
3/12/2011	5:02:57 PM	SiCl4 MFC set to  0.000000
3/12/2011	5:02:57 PM	Bypass solenoid MFC set to  0.000000
3/12/2011	5:02:57 PM	Tube furnace set to 0
3/12/2011	5:03:29 PM	Helium valve closed
3/12/2011	5:03:29 PM	H2 valve closed
3/12/2011	5:03:29 PM	BCl3 valve closed
3/12/2011	5:03:29 PM	PH3 valve closed
3/12/2011	5:03:29 PM	SiCl4 pre valve closed
3/12/2011	5:03:29 PM	SiCl4 post valve closed
3/12/2011	5:03:29 PM	Bubbler valve closed
3/12/2011	5:03:29 PM	Main Vac valve opened
3/12/2011	5:03:29 PM	Bypass valve opened
3/12/2011	5:03:29 PM	Helium MFC set to  0.000000
3/12/2011	5:03:29 PM	H2 MFC set to  0.000000
3/12/2011	5:03:29 PM	BCl3 MFC set to  0.000000
3/12/2011	5:03:29 PM	PHl3 MFC set to  0.000000
3/12/2011	5:03:29 PM	SiCl4 MFC set to  0.000000
3/12/2011	5:03:29 PM	Bypass solenoid MFC set to  0.000000
3/12/2011	5:03:29 PM	Tube furnace set to 0
3/12/2011	5:03:29 PM	Run finished at 5:03 PM
3/12/2011	5:03:29 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/12/2011	5:04:46 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
3/12/2011	5:04:58 PM	Recipe started at 5:04 PM
3/12/2011	5:04:58 PM	Helium valve closed
3/12/2011	5:04:58 PM	H2 valve closed
3/12/2011	5:04:58 PM	BCl3 valve closed
3/12/2011	5:04:58 PM	PH3 valve closed
3/12/2011	5:04:58 PM	SiCl4 pre valve closed
3/12/2011	5:04:58 PM	SiCl4 post valve closed
3/12/2011	5:04:58 PM	Main Vac valve closed
3/12/2011	5:04:58 PM	Bubbler valve closed
3/12/2011	5:04:58 PM	Bypass valve opened
3/12/2011	5:04:58 PM	Helium MFC set to  0.000000
3/12/2011	5:04:58 PM	H2 MFC set to  0.000000
3/12/2011	5:04:58 PM	BCl3 MFC set to  0.000000
3/12/2011	5:04:58 PM	PHl3 MFC set to  0.000000
3/12/2011	5:04:58 PM	SiCl4 MFC set to  0.000000
3/12/2011	5:04:58 PM	Bypass solenoid MFC set to  0.000000
3/12/2011	5:04:58 PM	Tube furnace set to 0
3/12/2011	5:04:59 PM	Helium valve closed
3/12/2011	5:04:59 PM	H2 valve closed
3/12/2011	5:04:59 PM	BCl3 valve closed
3/12/2011	5:04:59 PM	PH3 valve closed
3/12/2011	5:04:59 PM	SiCl4 pre valve closed
3/12/2011	5:04:59 PM	SiCl4 post valve closed
3/12/2011	5:04:59 PM	Bubbler valve closed
3/12/2011	5:04:59 PM	Main Vac valve opened
3/12/2011	5:04:59 PM	Bypass valve opened
3/12/2011	5:04:59 PM	Helium MFC set to  0.000000
3/12/2011	5:04:59 PM	H2 MFC set to  0.000000
3/12/2011	5:04:59 PM	BCl3 MFC set to  0.000000
3/12/2011	5:04:59 PM	PHl3 MFC set to  0.000000
3/12/2011	5:04:59 PM	SiCl4 MFC set to  0.000000
3/12/2011	5:04:59 PM	Bypass solenoid MFC set to  0.000000
3/12/2011	5:04:59 PM	Tube furnace set to 0
3/12/2011	5:05:59 PM	H2 valve closed
3/12/2011	5:05:59 PM	BCl3 valve closed
3/12/2011	5:05:59 PM	PH3 valve closed
3/12/2011	5:05:59 PM	SiCl4 pre valve closed
3/12/2011	5:05:59 PM	SiCl4 post valve closed
3/12/2011	5:05:59 PM	Bubbler valve closed
3/12/2011	5:05:59 PM	Helium valve opened
3/12/2011	5:05:59 PM	Main Vac valve opened
3/12/2011	5:05:59 PM	Bypass valve opened
3/12/2011	5:05:59 PM	Helium MFC set to  100.000000
3/12/2011	5:05:59 PM	H2 MFC set to  0.000000
3/12/2011	5:05:59 PM	BCl3 MFC set to  0.000000
3/12/2011	5:05:59 PM	PHl3 MFC set to  0.000000
3/12/2011	5:05:59 PM	SiCl4 MFC set to  0.000000
3/12/2011	5:05:59 PM	Bypass solenoid MFC set to  0.000000
3/12/2011	5:05:59 PM	Tube furnace set to 0
3/12/2011	5:06:59 PM	Helium valve closed
3/12/2011	5:06:59 PM	H2 valve closed
3/12/2011	5:06:59 PM	BCl3 valve closed
3/12/2011	5:06:59 PM	PH3 valve closed
3/12/2011	5:06:59 PM	SiCl4 pre valve closed
3/12/2011	5:06:59 PM	SiCl4 post valve closed
3/12/2011	5:06:59 PM	Bubbler valve closed
3/12/2011	5:06:59 PM	Main Vac valve opened
3/12/2011	5:06:59 PM	Bypass valve opened
3/12/2011	5:06:59 PM	Helium MFC set to  0.000000
3/12/2011	5:06:59 PM	H2 MFC set to  0.000000
3/12/2011	5:06:59 PM	BCl3 MFC set to  0.000000
3/12/2011	5:06:59 PM	PHl3 MFC set to  0.000000
3/12/2011	5:06:59 PM	SiCl4 MFC set to  0.000000
3/12/2011	5:06:59 PM	Bypass solenoid MFC set to  0.000000
3/12/2011	5:06:59 PM	Tube furnace set to 0
3/12/2011	5:07:59 PM	H2 valve closed
3/12/2011	5:07:59 PM	BCl3 valve closed
3/12/2011	5:07:59 PM	PH3 valve closed
3/12/2011	5:07:59 PM	SiCl4 pre valve closed
3/12/2011	5:07:59 PM	SiCl4 post valve closed
3/12/2011	5:07:59 PM	Bubbler valve closed
3/12/2011	5:07:59 PM	Helium valve opened
3/12/2011	5:07:59 PM	Main Vac valve opened
3/12/2011	5:07:59 PM	Bypass valve opened
3/12/2011	5:07:59 PM	Helium MFC set to  100.000000
3/12/2011	5:07:59 PM	H2 MFC set to  0.000000
3/12/2011	5:07:59 PM	BCl3 MFC set to  0.000000
3/12/2011	5:07:59 PM	PHl3 MFC set to  0.000000
3/12/2011	5:07:59 PM	SiCl4 MFC set to  0.000000
3/12/2011	5:07:59 PM	Bypass solenoid MFC set to  0.000000
3/12/2011	5:07:59 PM	Tube furnace set to 0
3/12/2011	5:08:59 PM	Helium valve closed
3/12/2011	5:08:59 PM	H2 valve closed
3/12/2011	5:08:59 PM	BCl3 valve closed
3/12/2011	5:08:59 PM	PH3 valve closed
3/12/2011	5:08:59 PM	SiCl4 pre valve closed
3/12/2011	5:08:59 PM	SiCl4 post valve closed
3/12/2011	5:08:59 PM	Bubbler valve closed
3/12/2011	5:08:59 PM	Main Vac valve opened
3/12/2011	5:08:59 PM	Bypass valve opened
3/12/2011	5:08:59 PM	Helium MFC set to  0.000000
3/12/2011	5:08:59 PM	H2 MFC set to  0.000000
3/12/2011	5:08:59 PM	BCl3 MFC set to  0.000000
3/12/2011	5:08:59 PM	PHl3 MFC set to  0.000000
3/12/2011	5:08:59 PM	SiCl4 MFC set to  0.000000
3/12/2011	5:08:59 PM	Bypass solenoid MFC set to  0.000000
3/12/2011	5:09:00 PM	Tube furnace set to 0
3/12/2011	5:10:00 PM	H2 valve closed
3/12/2011	5:10:00 PM	BCl3 valve closed
3/12/2011	5:10:00 PM	PH3 valve closed
3/12/2011	5:10:00 PM	SiCl4 pre valve closed
3/12/2011	5:10:00 PM	SiCl4 post valve closed
3/12/2011	5:10:00 PM	Bubbler valve closed
3/12/2011	5:10:00 PM	Helium valve opened
3/12/2011	5:10:00 PM	Main Vac valve opened
3/12/2011	5:10:00 PM	Bypass valve opened
3/12/2011	5:10:00 PM	Helium MFC set to  100.000000
3/12/2011	5:10:00 PM	H2 MFC set to  0.000000
3/12/2011	5:10:00 PM	BCl3 MFC set to  0.000000
3/12/2011	5:10:00 PM	PHl3 MFC set to  0.000000
3/12/2011	5:10:00 PM	SiCl4 MFC set to  0.000000
3/12/2011	5:10:00 PM	Bypass solenoid MFC set to  0.000000
3/12/2011	5:10:00 PM	Tube furnace set to 0
3/12/2011	5:11:00 PM	Helium valve closed
3/12/2011	5:11:00 PM	H2 valve closed
3/12/2011	5:11:00 PM	BCl3 valve closed
3/12/2011	5:11:00 PM	PH3 valve closed
3/12/2011	5:11:00 PM	SiCl4 pre valve closed
3/12/2011	5:11:00 PM	SiCl4 post valve closed
3/12/2011	5:11:00 PM	Bubbler valve closed
3/12/2011	5:11:00 PM	Main Vac valve opened
3/12/2011	5:11:00 PM	Bypass valve opened
3/12/2011	5:11:00 PM	Helium MFC set to  0.000000
3/12/2011	5:11:00 PM	H2 MFC set to  0.000000
3/12/2011	5:11:00 PM	BCl3 MFC set to  0.000000
3/12/2011	5:11:00 PM	PHl3 MFC set to  0.000000
3/12/2011	5:11:00 PM	SiCl4 MFC set to  0.000000
3/12/2011	5:11:00 PM	Bypass solenoid MFC set to  0.000000
3/12/2011	5:11:00 PM	Tube furnace set to 0
3/12/2011	5:12:00 PM	H2 valve closed
3/12/2011	5:12:00 PM	BCl3 valve closed
3/12/2011	5:12:00 PM	PH3 valve closed
3/12/2011	5:12:00 PM	SiCl4 pre valve closed
3/12/2011	5:12:00 PM	SiCl4 post valve closed
3/12/2011	5:12:00 PM	Bubbler valve closed
3/12/2011	5:12:00 PM	Helium valve opened
3/12/2011	5:12:00 PM	Main Vac valve opened
3/12/2011	5:12:00 PM	Bypass valve opened
3/12/2011	5:12:00 PM	Helium MFC set to  100.000000
3/12/2011	5:12:00 PM	H2 MFC set to  0.000000
3/12/2011	5:12:00 PM	BCl3 MFC set to  0.000000
3/12/2011	5:12:00 PM	PHl3 MFC set to  0.000000
3/12/2011	5:12:00 PM	SiCl4 MFC set to  0.000000
3/12/2011	5:12:00 PM	Bypass solenoid MFC set to  0.000000
3/12/2011	5:12:00 PM	Tube furnace set to 0
3/12/2011	5:13:00 PM	Helium valve closed
3/12/2011	5:13:00 PM	H2 valve closed
3/12/2011	5:13:00 PM	BCl3 valve closed
3/12/2011	5:13:00 PM	PH3 valve closed
3/12/2011	5:13:00 PM	SiCl4 pre valve closed
3/12/2011	5:13:00 PM	SiCl4 post valve closed
3/12/2011	5:13:00 PM	Bubbler valve closed
3/12/2011	5:13:00 PM	Main Vac valve opened
3/12/2011	5:13:00 PM	Bypass valve opened
3/12/2011	5:13:00 PM	Helium MFC set to  0.000000
3/12/2011	5:13:00 PM	H2 MFC set to  0.000000
3/12/2011	5:13:00 PM	BCl3 MFC set to  0.000000
3/12/2011	5:13:00 PM	PHl3 MFC set to  0.000000
3/12/2011	5:13:00 PM	SiCl4 MFC set to  0.000000
3/12/2011	5:13:00 PM	Bypass solenoid MFC set to  0.000000
3/12/2011	5:13:00 PM	Tube furnace set to 0
3/12/2011	5:14:00 PM	H2 valve closed
3/12/2011	5:14:00 PM	BCl3 valve closed
3/12/2011	5:14:00 PM	PH3 valve closed
3/12/2011	5:14:00 PM	SiCl4 pre valve closed
3/12/2011	5:14:00 PM	SiCl4 post valve closed
3/12/2011	5:14:00 PM	Bubbler valve closed
3/12/2011	5:14:00 PM	Helium valve opened
3/12/2011	5:14:00 PM	Main Vac valve opened
3/12/2011	5:14:00 PM	Bypass valve opened
3/12/2011	5:14:00 PM	Helium MFC set to  100.000000
3/12/2011	5:14:00 PM	H2 MFC set to  0.000000
3/12/2011	5:14:00 PM	BCl3 MFC set to  0.000000
3/12/2011	5:14:00 PM	PHl3 MFC set to  0.000000
3/12/2011	5:14:00 PM	SiCl4 MFC set to  0.000000
3/12/2011	5:14:00 PM	Bypass solenoid MFC set to  0.000000
3/12/2011	5:14:01 PM	Tube furnace set to 0
3/12/2011	5:15:01 PM	Helium valve closed
3/12/2011	5:15:01 PM	H2 valve closed
3/12/2011	5:15:01 PM	BCl3 valve closed
3/12/2011	5:15:01 PM	PH3 valve closed
3/12/2011	5:15:01 PM	SiCl4 pre valve closed
3/12/2011	5:15:01 PM	SiCl4 post valve closed
3/12/2011	5:15:01 PM	Bubbler valve closed
3/12/2011	5:15:01 PM	Main Vac valve opened
3/12/2011	5:15:01 PM	Bypass valve opened
3/12/2011	5:15:01 PM	Helium MFC set to  0.000000
3/12/2011	5:15:01 PM	H2 MFC set to  0.000000
3/12/2011	5:15:01 PM	BCl3 MFC set to  0.000000
3/12/2011	5:15:01 PM	PHl3 MFC set to  0.000000
3/12/2011	5:15:01 PM	SiCl4 MFC set to  0.000000
3/12/2011	5:15:01 PM	Bypass solenoid MFC set to  0.000000
3/12/2011	5:15:01 PM	Tube furnace set to 0
3/12/2011	5:16:01 PM	H2 valve closed
3/12/2011	5:16:01 PM	BCl3 valve closed
3/12/2011	5:16:01 PM	PH3 valve closed
3/12/2011	5:16:01 PM	SiCl4 pre valve closed
3/12/2011	5:16:01 PM	SiCl4 post valve closed
3/12/2011	5:16:01 PM	Bubbler valve closed
3/12/2011	5:16:01 PM	Helium valve opened
3/12/2011	5:16:01 PM	Main Vac valve opened
3/12/2011	5:16:01 PM	Bypass valve opened
3/12/2011	5:16:01 PM	Helium MFC set to  100.000000
3/12/2011	5:16:01 PM	H2 MFC set to  0.000000
3/12/2011	5:16:01 PM	BCl3 MFC set to  0.000000
3/12/2011	5:16:01 PM	PHl3 MFC set to  0.000000
3/12/2011	5:16:01 PM	SiCl4 MFC set to  0.000000
3/12/2011	5:16:01 PM	Bypass solenoid MFC set to  0.000000
3/12/2011	5:16:01 PM	Tube furnace set to 0
3/12/2011	5:17:01 PM	Helium valve closed
3/12/2011	5:17:01 PM	H2 valve closed
3/12/2011	5:17:01 PM	BCl3 valve closed
3/12/2011	5:17:01 PM	PH3 valve closed
3/12/2011	5:17:01 PM	SiCl4 pre valve closed
3/12/2011	5:17:01 PM	SiCl4 post valve closed
3/12/2011	5:17:01 PM	Bubbler valve closed
3/12/2011	5:17:01 PM	Main Vac valve opened
3/12/2011	5:17:01 PM	Bypass valve opened
3/12/2011	5:17:01 PM	Helium MFC set to  0.000000
3/12/2011	5:17:01 PM	H2 MFC set to  0.000000
3/12/2011	5:17:01 PM	BCl3 MFC set to  0.000000
3/12/2011	5:17:01 PM	PHl3 MFC set to  0.000000
3/12/2011	5:17:01 PM	SiCl4 MFC set to  0.000000
3/12/2011	5:17:01 PM	Bypass solenoid MFC set to  0.000000
3/12/2011	5:17:01 PM	Tube furnace set to 0
3/12/2011	5:18:01 PM	H2 valve closed
3/12/2011	5:18:01 PM	BCl3 valve closed
3/12/2011	5:18:01 PM	PH3 valve closed
3/12/2011	5:18:01 PM	SiCl4 pre valve closed
3/12/2011	5:18:01 PM	SiCl4 post valve closed
3/12/2011	5:18:01 PM	Bubbler valve closed
3/12/2011	5:18:01 PM	Helium valve opened
3/12/2011	5:18:01 PM	Main Vac valve opened
3/12/2011	5:18:01 PM	Bypass valve opened
3/12/2011	5:18:01 PM	Helium MFC set to  100.000000
3/12/2011	5:18:01 PM	H2 MFC set to  0.000000
3/12/2011	5:18:01 PM	BCl3 MFC set to  0.000000
3/12/2011	5:18:01 PM	PHl3 MFC set to  0.000000
3/12/2011	5:18:01 PM	SiCl4 MFC set to  0.000000
3/12/2011	5:18:01 PM	Bypass solenoid MFC set to  0.000000
3/12/2011	5:18:01 PM	Tube furnace set to 0
3/12/2011	5:19:01 PM	Helium valve closed
3/12/2011	5:19:01 PM	H2 valve closed
3/12/2011	5:19:01 PM	BCl3 valve closed
3/12/2011	5:19:01 PM	PH3 valve closed
3/12/2011	5:19:01 PM	SiCl4 pre valve closed
3/12/2011	5:19:01 PM	SiCl4 post valve closed
3/12/2011	5:19:01 PM	Bubbler valve closed
3/12/2011	5:19:01 PM	Main Vac valve opened
3/12/2011	5:19:01 PM	Bypass valve opened
3/12/2011	5:19:01 PM	Helium MFC set to  0.000000
3/12/2011	5:19:01 PM	H2 MFC set to  0.000000
3/12/2011	5:19:01 PM	BCl3 MFC set to  0.000000
3/12/2011	5:19:01 PM	PHl3 MFC set to  0.000000
3/12/2011	5:19:01 PM	SiCl4 MFC set to  0.000000
3/12/2011	5:19:01 PM	Bypass solenoid MFC set to  0.000000
3/12/2011	5:19:02 PM	Tube furnace set to 0
3/12/2011	5:20:02 PM	H2 valve closed
3/12/2011	5:20:02 PM	BCl3 valve closed
3/12/2011	5:20:02 PM	PH3 valve closed
3/12/2011	5:20:02 PM	SiCl4 pre valve closed
3/12/2011	5:20:02 PM	SiCl4 post valve closed
3/12/2011	5:20:02 PM	Bubbler valve closed
3/12/2011	5:20:02 PM	Helium valve opened
3/12/2011	5:20:02 PM	Main Vac valve opened
3/12/2011	5:20:02 PM	Bypass valve opened
3/12/2011	5:20:02 PM	Helium MFC set to  100.000000
3/12/2011	5:20:02 PM	H2 MFC set to  0.000000
3/12/2011	5:20:02 PM	BCl3 MFC set to  0.000000
3/12/2011	5:20:02 PM	PHl3 MFC set to  0.000000
3/12/2011	5:20:02 PM	SiCl4 MFC set to  0.000000
3/12/2011	5:20:02 PM	Bypass solenoid MFC set to  0.000000
3/12/2011	5:20:02 PM	Tube furnace set to 0
3/12/2011	5:21:02 PM	Helium valve closed
3/12/2011	5:21:02 PM	H2 valve closed
3/12/2011	5:21:02 PM	BCl3 valve closed
3/12/2011	5:21:02 PM	PH3 valve closed
3/12/2011	5:21:02 PM	SiCl4 pre valve closed
3/12/2011	5:21:02 PM	SiCl4 post valve closed
3/12/2011	5:21:02 PM	Bubbler valve closed
3/12/2011	5:21:02 PM	Main Vac valve opened
3/12/2011	5:21:02 PM	Bypass valve opened
3/12/2011	5:21:02 PM	Helium MFC set to  0.000000
3/12/2011	5:21:02 PM	H2 MFC set to  0.000000
3/12/2011	5:21:02 PM	BCl3 MFC set to  0.000000
3/12/2011	5:21:02 PM	PHl3 MFC set to  0.000000
3/12/2011	5:21:02 PM	SiCl4 MFC set to  0.000000
3/12/2011	5:21:02 PM	Bypass solenoid MFC set to  0.000000
3/12/2011	5:21:02 PM	Tube furnace set to 0
3/12/2011	5:22:02 PM	H2 valve closed
3/12/2011	5:22:02 PM	BCl3 valve closed
3/12/2011	5:22:02 PM	PH3 valve closed
3/12/2011	5:22:02 PM	SiCl4 pre valve closed
3/12/2011	5:22:02 PM	SiCl4 post valve closed
3/12/2011	5:22:02 PM	Bubbler valve closed
3/12/2011	5:22:02 PM	Helium valve opened
3/12/2011	5:22:02 PM	Main Vac valve opened
3/12/2011	5:22:02 PM	Bypass valve opened
3/12/2011	5:22:02 PM	Helium MFC set to  100.000000
3/12/2011	5:22:02 PM	H2 MFC set to  0.000000
3/12/2011	5:22:02 PM	BCl3 MFC set to  0.000000
3/12/2011	5:22:02 PM	PHl3 MFC set to  0.000000
3/12/2011	5:22:02 PM	SiCl4 MFC set to  0.000000
3/12/2011	5:22:02 PM	Bypass solenoid MFC set to  0.000000
3/12/2011	5:22:02 PM	Tube furnace set to 0
3/12/2011	5:23:02 PM	Helium valve closed
3/12/2011	5:23:02 PM	H2 valve closed
3/12/2011	5:23:02 PM	BCl3 valve closed
3/12/2011	5:23:02 PM	PH3 valve closed
3/12/2011	5:23:02 PM	SiCl4 pre valve closed
3/12/2011	5:23:02 PM	SiCl4 post valve closed
3/12/2011	5:23:02 PM	Bubbler valve closed
3/12/2011	5:23:02 PM	Main Vac valve opened
3/12/2011	5:23:02 PM	Bypass valve opened
3/12/2011	5:23:02 PM	Helium MFC set to  0.000000
3/12/2011	5:23:02 PM	H2 MFC set to  0.000000
3/12/2011	5:23:02 PM	BCl3 MFC set to  0.000000
3/12/2011	5:23:02 PM	PHl3 MFC set to  0.000000
3/12/2011	5:23:02 PM	SiCl4 MFC set to  0.000000
3/12/2011	5:23:02 PM	Bypass solenoid MFC set to  0.000000
3/12/2011	5:23:02 PM	Tube furnace set to 0
3/12/2011	5:24:02 PM	H2 valve closed
3/12/2011	5:24:02 PM	BCl3 valve closed
3/12/2011	5:24:02 PM	PH3 valve closed
3/12/2011	5:24:02 PM	SiCl4 pre valve closed
3/12/2011	5:24:02 PM	SiCl4 post valve closed
3/12/2011	5:24:02 PM	Bubbler valve closed
3/12/2011	5:24:02 PM	Helium valve opened
3/12/2011	5:24:02 PM	Main Vac valve opened
3/12/2011	5:24:02 PM	Bypass valve opened
3/12/2011	5:24:02 PM	Helium MFC set to  100.000000
3/12/2011	5:24:02 PM	H2 MFC set to  0.000000
3/12/2011	5:24:02 PM	BCl3 MFC set to  0.000000
3/12/2011	5:24:02 PM	PHl3 MFC set to  0.000000
3/12/2011	5:24:02 PM	SiCl4 MFC set to  0.000000
3/12/2011	5:24:02 PM	Bypass solenoid MFC set to  0.000000
3/12/2011	5:24:03 PM	Tube furnace set to 0
3/12/2011	5:25:03 PM	Helium valve closed
3/12/2011	5:25:03 PM	H2 valve closed
3/12/2011	5:25:03 PM	BCl3 valve closed
3/12/2011	5:25:03 PM	PH3 valve closed
3/12/2011	5:25:03 PM	SiCl4 pre valve closed
3/12/2011	5:25:03 PM	SiCl4 post valve closed
3/12/2011	5:25:03 PM	Bubbler valve closed
3/12/2011	5:25:03 PM	Main Vac valve opened
3/12/2011	5:25:03 PM	Bypass valve opened
3/12/2011	5:25:03 PM	Helium MFC set to  0.000000
3/12/2011	5:25:03 PM	H2 MFC set to  0.000000
3/12/2011	5:25:03 PM	BCl3 MFC set to  0.000000
3/12/2011	5:25:03 PM	PHl3 MFC set to  0.000000
3/12/2011	5:25:03 PM	SiCl4 MFC set to  0.000000
3/12/2011	5:25:03 PM	Bypass solenoid MFC set to  0.000000
3/12/2011	5:25:03 PM	Tube furnace set to 0
3/12/2011	5:25:04 PM	Run finished at 5:25 PM
3/12/2011	5:25:04 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
3/12/2011	7:29:07 PM	Helium MFC set to  50.000000
3/12/2011	7:29:08 PM	Helium valve opened
3/12/2011	7:29:39 PM	Helium MFC set to  0.000000
3/12/2011	7:29:40 PM	Helium valve closed
3/12/2011	7:30:28 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
3/12/2011	7:30:29 PM	Recipe started at 7:30 PM
3/12/2011	7:30:29 PM	Helium valve closed
3/12/2011	7:30:29 PM	H2 valve closed
3/12/2011	7:30:29 PM	BCl3 valve closed
3/12/2011	7:30:29 PM	PH3 valve closed
3/12/2011	7:30:29 PM	SiCl4 pre valve closed
3/12/2011	7:30:29 PM	SiCl4 post valve closed
3/12/2011	7:30:29 PM	Main Vac valve closed
3/12/2011	7:30:29 PM	Bypass valve closed
3/12/2011	7:30:29 PM	Bubbler valve closed
3/12/2011	7:30:29 PM	Helium MFC set to  0.000000
3/12/2011	7:30:29 PM	H2 MFC set to  0.000000
3/12/2011	7:30:29 PM	BCl3 MFC set to  0.000000
3/12/2011	7:30:29 PM	PHl3 MFC set to  0.000000
3/12/2011	7:30:29 PM	SiCl4 MFC set to  0.000000
3/12/2011	7:30:29 PM	Bypass solenoid MFC set to  0.000000
3/12/2011	7:30:29 PM	Tube furnace set to 0
3/12/2011	7:30:29 PM	Run finished at 7:30 PM
3/12/2011	7:30:29 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
3/12/2011	7:31:06 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/12/2011	7:31:06 PM	Recipe started at 7:31 PM
3/12/2011	7:31:06 PM	Helium valve closed
3/12/2011	7:31:06 PM	H2 valve closed
3/12/2011	7:31:06 PM	BCl3 valve closed
3/12/2011	7:31:06 PM	PH3 valve closed
3/12/2011	7:31:06 PM	SiCl4 pre valve closed
3/12/2011	7:31:06 PM	SiCl4 post valve closed
3/12/2011	7:31:06 PM	Main Vac valve closed
3/12/2011	7:31:07 PM	Bubbler valve closed
3/12/2011	7:31:07 PM	Bypass valve opened
3/12/2011	7:31:07 PM	Helium MFC set to  0.000000
3/12/2011	7:31:07 PM	H2 MFC set to  0.000000
3/12/2011	7:31:07 PM	BCl3 MFC set to  0.000000
3/12/2011	7:31:07 PM	PHl3 MFC set to  0.000000
3/12/2011	7:31:07 PM	SiCl4 MFC set to  0.000000
3/12/2011	7:31:07 PM	Bypass solenoid MFC set to  0.000000
3/12/2011	7:31:07 PM	Tube furnace set to 0
3/12/2011	7:31:07 PM	Helium valve closed
3/12/2011	7:31:07 PM	H2 valve closed
3/12/2011	7:31:07 PM	BCl3 valve closed
3/12/2011	7:31:07 PM	PH3 valve closed
3/12/2011	7:31:07 PM	SiCl4 pre valve closed
3/12/2011	7:31:07 PM	SiCl4 post valve closed
3/12/2011	7:31:07 PM	Bubbler valve closed
3/12/2011	7:31:07 PM	Main Vac valve opened
3/12/2011	7:31:07 PM	Bypass valve opened
3/12/2011	7:31:07 PM	Helium MFC set to  0.000000
3/12/2011	7:31:07 PM	H2 MFC set to  0.000000
3/12/2011	7:31:07 PM	BCl3 MFC set to  0.000000
3/12/2011	7:31:07 PM	PHl3 MFC set to  0.000000
3/12/2011	7:31:07 PM	SiCl4 MFC set to  0.000000
3/12/2011	7:31:07 PM	Bypass solenoid MFC set to  0.000000
3/12/2011	7:31:07 PM	Tube furnace set to 0
3/12/2011	7:31:07 PM	Run finished at 7:31 PM
3/12/2011	7:31:07 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/12/2011	7:31:22 PM	Helium MFC set to  50.000000
3/12/2011	7:31:23 PM	Helium valve opened
3/12/2011	7:32:03 PM	Recipe started at 7:32 PM
3/12/2011	7:32:03 PM	Helium valve closed
3/12/2011	7:32:03 PM	BCl3 valve closed
3/12/2011	7:32:03 PM	PH3 valve closed
3/12/2011	7:32:03 PM	SiCl4 pre valve closed
3/12/2011	7:32:03 PM	SiCl4 post valve closed
3/12/2011	7:32:03 PM	Main Vac valve closed
3/12/2011	7:32:03 PM	Bypass valve closed
3/12/2011	7:32:03 PM	Bubbler valve closed
3/12/2011	7:32:03 PM	H2 valve opened
3/12/2011	7:32:03 PM	Helium MFC set to  0.000000
3/12/2011	7:32:03 PM	H2 MFC set to  500.000000
3/12/2011	7:32:03 PM	BCl3 MFC set to  0.000000
3/12/2011	7:32:03 PM	PHl3 MFC set to  0.000000
3/12/2011	7:32:03 PM	SiCl4 MFC set to  0.000000
3/12/2011	7:32:03 PM	Bypass solenoid MFC set to  0.000000
3/12/2011	7:32:03 PM	Tube furnace set to 0
3/12/2011	7:33:26 PM	Helium valve closed
3/12/2011	7:33:26 PM	BCl3 valve closed
3/12/2011	7:33:26 PM	PH3 valve closed
3/12/2011	7:33:26 PM	SiCl4 pre valve closed
3/12/2011	7:33:26 PM	SiCl4 post valve closed
3/12/2011	7:33:26 PM	Main Vac valve closed
3/12/2011	7:33:26 PM	Bypass valve closed
3/12/2011	7:33:26 PM	H2 valve opened
3/12/2011	7:33:26 PM	Bubbler valve opened
3/12/2011	7:33:26 PM	Helium MFC set to  0.000000
3/12/2011	7:33:26 PM	H2 MFC set to  500.000000
3/12/2011	7:33:26 PM	BCl3 MFC set to  0.000000
3/12/2011	7:33:26 PM	PHl3 MFC set to  0.000000
3/12/2011	7:33:26 PM	SiCl4 MFC set to  0.000000
3/12/2011	7:33:26 PM	Bypass solenoid MFC set to  0.000000
3/12/2011	7:33:27 PM	Tube furnace set to 1000
3/12/2011	7:53:26 PM	Helium valve closed
3/12/2011	7:53:26 PM	PH3 valve closed
3/12/2011	7:53:26 PM	Main Vac valve closed
3/12/2011	7:53:26 PM	Bypass valve closed
3/12/2011	7:53:26 PM	H2 valve opened
3/12/2011	7:53:27 PM	BCl3 valve opened
3/12/2011	7:53:27 PM	SiCl4 pre valve opened
3/12/2011	7:53:27 PM	SiCl4 post valve opened
3/12/2011	7:53:27 PM	Bubbler valve opened
3/12/2011	7:53:27 PM	Helium MFC set to  0.000000
3/12/2011	7:53:27 PM	H2 MFC set to  500.000000
3/12/2011	7:53:27 PM	BCl3 MFC set to  3.000000
3/12/2011	7:53:27 PM	PHl3 MFC set to  0.000000
3/12/2011	7:53:27 PM	SiCl4 MFC set to  50.000000
3/12/2011	7:53:27 PM	Bypass solenoid MFC set to  0.000000
3/12/2011	7:53:27 PM	Tube furnace set to 1000
3/12/2011	8:13:27 PM	H2 valve closed
3/12/2011	8:13:27 PM	BCl3 valve closed
3/12/2011	8:13:27 PM	PH3 valve closed
3/12/2011	8:13:27 PM	SiCl4 pre valve closed
3/12/2011	8:13:27 PM	SiCl4 post valve closed
3/12/2011	8:13:27 PM	Main Vac valve closed
3/12/2011	8:13:27 PM	Bypass valve closed
3/12/2011	8:13:27 PM	Helium valve opened
3/12/2011	8:13:27 PM	Bubbler valve opened
3/12/2011	8:13:27 PM	Helium MFC set to  500.000000
3/12/2011	8:13:27 PM	H2 MFC set to  0.000000
3/12/2011	8:13:27 PM	BCl3 MFC set to  0.000000
3/12/2011	8:13:27 PM	PHl3 MFC set to  0.000000
3/12/2011	8:13:27 PM	SiCl4 MFC set to  0.000000
3/12/2011	8:13:27 PM	Bypass solenoid MFC set to  0.000000
3/12/2011	8:13:27 PM	Tube furnace set to 0
3/12/2011	8:33:27 PM	Helium valve closed
3/12/2011	8:33:27 PM	H2 valve closed
3/12/2011	8:33:27 PM	BCl3 valve closed
3/12/2011	8:33:27 PM	PH3 valve closed
3/12/2011	8:33:27 PM	SiCl4 pre valve closed
3/12/2011	8:33:27 PM	SiCl4 post valve closed
3/12/2011	8:33:27 PM	Main Vac valve closed
3/12/2011	8:33:27 PM	Bypass valve closed
3/12/2011	8:33:27 PM	Bubbler valve closed
3/12/2011	8:33:27 PM	Helium MFC set to  0.000000
3/12/2011	8:33:27 PM	H2 MFC set to  0.000000
3/12/2011	8:33:27 PM	BCl3 MFC set to  0.000000
3/12/2011	8:33:27 PM	PHl3 MFC set to  0.000000
3/12/2011	8:33:27 PM	SiCl4 MFC set to  0.000000
3/12/2011	8:33:27 PM	Bypass solenoid MFC set to  0.000000
3/12/2011	8:33:27 PM	Tube furnace set to 0
3/12/2011	8:33:27 PM	Run finished at 8:33 PM
3/12/2011	8:58:18 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/12/2011	8:58:18 PM	Recipe started at 8:58 PM
3/12/2011	8:58:18 PM	H2 valve closed
3/12/2011	8:58:18 PM	BCl3 valve closed
3/12/2011	8:58:18 PM	PH3 valve closed
3/12/2011	8:58:18 PM	SiCl4 pre valve closed
3/12/2011	8:58:18 PM	SiCl4 post valve closed
3/12/2011	8:58:18 PM	Main Vac valve closed
3/12/2011	8:58:18 PM	Bypass valve closed
3/12/2011	8:58:18 PM	Bubbler valve closed
3/12/2011	8:58:18 PM	Helium valve opened
3/12/2011	8:58:18 PM	Helium MFC set to  500.000000
3/12/2011	8:58:18 PM	H2 MFC set to  0.000000
3/12/2011	8:58:18 PM	BCl3 MFC set to  0.000000
3/12/2011	8:58:18 PM	PHl3 MFC set to  0.000000
3/12/2011	8:58:18 PM	SiCl4 MFC set to  0.000000
3/12/2011	8:58:18 PM	Bypass solenoid MFC set to  0.000000
3/12/2011	8:58:18 PM	Tube furnace set to 0
3/12/2011	8:58:26 PM	Helium valve closed
3/12/2011	8:58:26 PM	H2 valve closed
3/12/2011	8:58:26 PM	BCl3 valve closed
3/12/2011	8:58:26 PM	PH3 valve closed
3/12/2011	8:58:26 PM	SiCl4 pre valve closed
3/12/2011	8:58:26 PM	SiCl4 post valve closed
3/12/2011	8:58:26 PM	Main Vac valve closed
3/12/2011	8:58:26 PM	Bypass valve closed
3/12/2011	8:58:26 PM	Bubbler valve closed
3/12/2011	8:58:26 PM	Helium MFC set to  0.000000
3/12/2011	8:58:26 PM	H2 MFC set to  0.000000
3/12/2011	8:58:26 PM	BCl3 MFC set to  0.000000
3/12/2011	8:58:26 PM	PHl3 MFC set to  0.000000
3/12/2011	8:58:26 PM	SiCl4 MFC set to  0.000000
3/12/2011	8:58:26 PM	Bypass solenoid MFC set to  0.000000
3/12/2011	8:58:26 PM	Tube furnace set to 0
3/12/2011	8:58:26 PM	Run finished at 8:58 PM
3/12/2011	8:58:26 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/12/2011	9:08:13 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/12/2011	9:08:14 PM	Recipe started at 9:08 PM
3/12/2011	9:08:14 PM	Helium valve closed
3/12/2011	9:08:14 PM	H2 valve closed
3/12/2011	9:08:14 PM	BCl3 valve closed
3/12/2011	9:08:14 PM	PH3 valve closed
3/12/2011	9:08:14 PM	SiCl4 pre valve closed
3/12/2011	9:08:14 PM	SiCl4 post valve closed
3/12/2011	9:08:14 PM	Main Vac valve closed
3/12/2011	9:08:14 PM	Bubbler valve closed
3/12/2011	9:08:14 PM	Bypass valve opened
3/12/2011	9:08:14 PM	Helium MFC set to  0.000000
3/12/2011	9:08:14 PM	H2 MFC set to  0.000000
3/12/2011	9:08:14 PM	BCl3 MFC set to  0.000000
3/12/2011	9:08:14 PM	PHl3 MFC set to  0.000000
3/12/2011	9:08:14 PM	SiCl4 MFC set to  0.000000
3/12/2011	9:08:14 PM	Bypass solenoid MFC set to  0.000000
3/12/2011	9:08:14 PM	Tube furnace set to 0
3/12/2011	9:08:47 PM	Helium valve closed
3/12/2011	9:08:47 PM	H2 valve closed
3/12/2011	9:08:47 PM	BCl3 valve closed
3/12/2011	9:08:47 PM	PH3 valve closed
3/12/2011	9:08:47 PM	SiCl4 pre valve closed
3/12/2011	9:08:47 PM	SiCl4 post valve closed
3/12/2011	9:08:47 PM	Bubbler valve closed
3/12/2011	9:08:47 PM	Main Vac valve opened
3/12/2011	9:08:47 PM	Bypass valve opened
3/12/2011	9:08:47 PM	Helium MFC set to  0.000000
3/12/2011	9:08:47 PM	H2 MFC set to  0.000000
3/12/2011	9:08:47 PM	BCl3 MFC set to  0.000000
3/12/2011	9:08:47 PM	PHl3 MFC set to  0.000000
3/12/2011	9:08:47 PM	SiCl4 MFC set to  0.000000
3/12/2011	9:08:47 PM	Bypass solenoid MFC set to  0.000000
3/12/2011	9:08:47 PM	Tube furnace set to 0
3/12/2011	9:08:47 PM	Run finished at 9:08 PM
3/12/2011	9:08:47 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/12/2011	9:09:15 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
3/12/2011	9:09:27 PM	Recipe started at 9:09 PM
3/12/2011	9:09:27 PM	Helium valve closed
3/12/2011	9:09:27 PM	H2 valve closed
3/12/2011	9:09:27 PM	BCl3 valve closed
3/12/2011	9:09:27 PM	PH3 valve closed
3/12/2011	9:09:27 PM	SiCl4 pre valve closed
3/12/2011	9:09:27 PM	SiCl4 post valve closed
3/12/2011	9:09:27 PM	Main Vac valve closed
3/12/2011	9:09:27 PM	Bubbler valve closed
3/12/2011	9:09:27 PM	Bypass valve opened
3/12/2011	9:09:27 PM	Helium MFC set to  0.000000
3/12/2011	9:09:27 PM	H2 MFC set to  0.000000
3/12/2011	9:09:27 PM	BCl3 MFC set to  0.000000
3/12/2011	9:09:27 PM	PHl3 MFC set to  0.000000
3/12/2011	9:09:27 PM	SiCl4 MFC set to  0.000000
3/12/2011	9:09:27 PM	Bypass solenoid MFC set to  0.000000
3/12/2011	9:09:28 PM	Tube furnace set to 0
3/12/2011	9:09:28 PM	Helium valve closed
3/12/2011	9:09:28 PM	H2 valve closed
3/12/2011	9:09:28 PM	BCl3 valve closed
3/12/2011	9:09:28 PM	PH3 valve closed
3/12/2011	9:09:28 PM	SiCl4 pre valve closed
3/12/2011	9:09:28 PM	SiCl4 post valve closed
3/12/2011	9:09:28 PM	Bubbler valve closed
3/12/2011	9:09:28 PM	Main Vac valve opened
3/12/2011	9:09:28 PM	Bypass valve opened
3/12/2011	9:09:28 PM	Helium MFC set to  0.000000
3/12/2011	9:09:28 PM	H2 MFC set to  0.000000
3/12/2011	9:09:28 PM	BCl3 MFC set to  0.000000
3/12/2011	9:09:28 PM	PHl3 MFC set to  0.000000
3/12/2011	9:09:28 PM	SiCl4 MFC set to  0.000000
3/12/2011	9:09:28 PM	Bypass solenoid MFC set to  0.000000
3/12/2011	9:09:28 PM	Tube furnace set to 0
3/12/2011	9:10:28 PM	H2 valve closed
3/12/2011	9:10:28 PM	BCl3 valve closed
3/12/2011	9:10:28 PM	PH3 valve closed
3/12/2011	9:10:28 PM	SiCl4 pre valve closed
3/12/2011	9:10:28 PM	SiCl4 post valve closed
3/12/2011	9:10:28 PM	Bubbler valve closed
3/12/2011	9:10:28 PM	Helium valve opened
3/12/2011	9:10:28 PM	Main Vac valve opened
3/12/2011	9:10:28 PM	Bypass valve opened
3/12/2011	9:10:28 PM	Helium MFC set to  100.000000
3/12/2011	9:10:28 PM	H2 MFC set to  0.000000
3/12/2011	9:10:28 PM	BCl3 MFC set to  0.000000
3/12/2011	9:10:28 PM	PHl3 MFC set to  0.000000
3/12/2011	9:10:28 PM	SiCl4 MFC set to  0.000000
3/12/2011	9:10:28 PM	Bypass solenoid MFC set to  0.000000
3/12/2011	9:10:28 PM	Tube furnace set to 0
3/12/2011	9:11:28 PM	Helium valve closed
3/12/2011	9:11:28 PM	H2 valve closed
3/12/2011	9:11:28 PM	BCl3 valve closed
3/12/2011	9:11:28 PM	PH3 valve closed
3/12/2011	9:11:28 PM	SiCl4 pre valve closed
3/12/2011	9:11:28 PM	SiCl4 post valve closed
3/12/2011	9:11:28 PM	Bubbler valve closed
3/12/2011	9:11:28 PM	Main Vac valve opened
3/12/2011	9:11:28 PM	Bypass valve opened
3/12/2011	9:11:28 PM	Helium MFC set to  0.000000
3/12/2011	9:11:28 PM	H2 MFC set to  0.000000
3/12/2011	9:11:28 PM	BCl3 MFC set to  0.000000
3/12/2011	9:11:28 PM	PHl3 MFC set to  0.000000
3/12/2011	9:11:28 PM	SiCl4 MFC set to  0.000000
3/12/2011	9:11:28 PM	Bypass solenoid MFC set to  0.000000
3/12/2011	9:11:28 PM	Tube furnace set to 0
3/12/2011	9:12:28 PM	H2 valve closed
3/12/2011	9:12:28 PM	BCl3 valve closed
3/12/2011	9:12:28 PM	PH3 valve closed
3/12/2011	9:12:28 PM	SiCl4 pre valve closed
3/12/2011	9:12:28 PM	SiCl4 post valve closed
3/12/2011	9:12:28 PM	Bubbler valve closed
3/12/2011	9:12:28 PM	Helium valve opened
3/12/2011	9:12:28 PM	Main Vac valve opened
3/12/2011	9:12:28 PM	Bypass valve opened
3/12/2011	9:12:28 PM	Helium MFC set to  100.000000
3/12/2011	9:12:28 PM	H2 MFC set to  0.000000
3/12/2011	9:12:28 PM	BCl3 MFC set to  0.000000
3/12/2011	9:12:28 PM	PHl3 MFC set to  0.000000
3/12/2011	9:12:28 PM	SiCl4 MFC set to  0.000000
3/12/2011	9:12:28 PM	Bypass solenoid MFC set to  0.000000
3/12/2011	9:12:29 PM	Tube furnace set to 0
3/12/2011	9:13:29 PM	Helium valve closed
3/12/2011	9:13:29 PM	H2 valve closed
3/12/2011	9:13:29 PM	BCl3 valve closed
3/12/2011	9:13:29 PM	PH3 valve closed
3/12/2011	9:13:29 PM	SiCl4 pre valve closed
3/12/2011	9:13:29 PM	SiCl4 post valve closed
3/12/2011	9:13:29 PM	Bubbler valve closed
3/12/2011	9:13:29 PM	Main Vac valve opened
3/12/2011	9:13:29 PM	Bypass valve opened
3/12/2011	9:13:29 PM	Helium MFC set to  0.000000
3/12/2011	9:13:29 PM	H2 MFC set to  0.000000
3/12/2011	9:13:29 PM	BCl3 MFC set to  0.000000
3/12/2011	9:13:29 PM	PHl3 MFC set to  0.000000
3/12/2011	9:13:29 PM	SiCl4 MFC set to  0.000000
3/12/2011	9:13:29 PM	Bypass solenoid MFC set to  0.000000
3/12/2011	9:13:29 PM	Tube furnace set to 0
3/12/2011	9:14:29 PM	H2 valve closed
3/12/2011	9:14:29 PM	BCl3 valve closed
3/12/2011	9:14:29 PM	PH3 valve closed
3/12/2011	9:14:29 PM	SiCl4 pre valve closed
3/12/2011	9:14:29 PM	SiCl4 post valve closed
3/12/2011	9:14:29 PM	Bubbler valve closed
3/12/2011	9:14:29 PM	Helium valve opened
3/12/2011	9:14:29 PM	Main Vac valve opened
3/12/2011	9:14:29 PM	Bypass valve opened
3/12/2011	9:14:29 PM	Helium MFC set to  100.000000
3/12/2011	9:14:29 PM	H2 MFC set to  0.000000
3/12/2011	9:14:29 PM	BCl3 MFC set to  0.000000
3/12/2011	9:14:29 PM	PHl3 MFC set to  0.000000
3/12/2011	9:14:29 PM	SiCl4 MFC set to  0.000000
3/12/2011	9:14:29 PM	Bypass solenoid MFC set to  0.000000
3/12/2011	9:14:29 PM	Tube furnace set to 0
3/12/2011	9:15:29 PM	Helium valve closed
3/12/2011	9:15:29 PM	H2 valve closed
3/12/2011	9:15:29 PM	BCl3 valve closed
3/12/2011	9:15:29 PM	PH3 valve closed
3/12/2011	9:15:29 PM	SiCl4 pre valve closed
3/12/2011	9:15:29 PM	SiCl4 post valve closed
3/12/2011	9:15:29 PM	Bubbler valve closed
3/12/2011	9:15:29 PM	Main Vac valve opened
3/12/2011	9:15:29 PM	Bypass valve opened
3/12/2011	9:15:29 PM	Helium MFC set to  0.000000
3/12/2011	9:15:29 PM	H2 MFC set to  0.000000
3/12/2011	9:15:29 PM	BCl3 MFC set to  0.000000
3/12/2011	9:15:29 PM	PHl3 MFC set to  0.000000
3/12/2011	9:15:29 PM	SiCl4 MFC set to  0.000000
3/12/2011	9:15:29 PM	Bypass solenoid MFC set to  0.000000
3/12/2011	9:15:29 PM	Tube furnace set to 0
3/12/2011	9:16:29 PM	H2 valve closed
3/12/2011	9:16:29 PM	BCl3 valve closed
3/12/2011	9:16:29 PM	PH3 valve closed
3/12/2011	9:16:29 PM	SiCl4 pre valve closed
3/12/2011	9:16:29 PM	SiCl4 post valve closed
3/12/2011	9:16:29 PM	Bubbler valve closed
3/12/2011	9:16:29 PM	Helium valve opened
3/12/2011	9:16:29 PM	Main Vac valve opened
3/12/2011	9:16:29 PM	Bypass valve opened
3/12/2011	9:16:29 PM	Helium MFC set to  100.000000
3/12/2011	9:16:29 PM	H2 MFC set to  0.000000
3/12/2011	9:16:29 PM	BCl3 MFC set to  0.000000
3/12/2011	9:16:29 PM	PHl3 MFC set to  0.000000
3/12/2011	9:16:29 PM	SiCl4 MFC set to  0.000000
3/12/2011	9:16:29 PM	Bypass solenoid MFC set to  0.000000
3/12/2011	9:16:29 PM	Tube furnace set to 0
3/12/2011	9:17:29 PM	Helium valve closed
3/12/2011	9:17:29 PM	H2 valve closed
3/12/2011	9:17:29 PM	BCl3 valve closed
3/12/2011	9:17:29 PM	PH3 valve closed
3/12/2011	9:17:29 PM	SiCl4 pre valve closed
3/12/2011	9:17:29 PM	SiCl4 post valve closed
3/12/2011	9:17:29 PM	Bubbler valve closed
3/12/2011	9:17:29 PM	Main Vac valve opened
3/12/2011	9:17:29 PM	Bypass valve opened
3/12/2011	9:17:29 PM	Helium MFC set to  0.000000
3/12/2011	9:17:29 PM	H2 MFC set to  0.000000
3/12/2011	9:17:29 PM	BCl3 MFC set to  0.000000
3/12/2011	9:17:29 PM	PHl3 MFC set to  0.000000
3/12/2011	9:17:29 PM	SiCl4 MFC set to  0.000000
3/12/2011	9:17:29 PM	Bypass solenoid MFC set to  0.000000
3/12/2011	9:17:30 PM	Tube furnace set to 0
3/12/2011	9:18:30 PM	H2 valve closed
3/12/2011	9:18:30 PM	BCl3 valve closed
3/12/2011	9:18:30 PM	PH3 valve closed
3/12/2011	9:18:30 PM	SiCl4 pre valve closed
3/12/2011	9:18:30 PM	SiCl4 post valve closed
3/12/2011	9:18:30 PM	Bubbler valve closed
3/12/2011	9:18:30 PM	Helium valve opened
3/12/2011	9:18:30 PM	Main Vac valve opened
3/12/2011	9:18:30 PM	Bypass valve opened
3/12/2011	9:18:30 PM	Helium MFC set to  100.000000
3/12/2011	9:18:30 PM	H2 MFC set to  0.000000
3/12/2011	9:18:30 PM	BCl3 MFC set to  0.000000
3/12/2011	9:18:30 PM	PHl3 MFC set to  0.000000
3/12/2011	9:18:30 PM	SiCl4 MFC set to  0.000000
3/12/2011	9:18:30 PM	Bypass solenoid MFC set to  0.000000
3/12/2011	9:18:30 PM	Tube furnace set to 0
3/12/2011	9:19:30 PM	Helium valve closed
3/12/2011	9:19:30 PM	H2 valve closed
3/12/2011	9:19:30 PM	BCl3 valve closed
3/12/2011	9:19:30 PM	PH3 valve closed
3/12/2011	9:19:30 PM	SiCl4 pre valve closed
3/12/2011	9:19:30 PM	SiCl4 post valve closed
3/12/2011	9:19:30 PM	Bubbler valve closed
3/12/2011	9:19:30 PM	Main Vac valve opened
3/12/2011	9:19:30 PM	Bypass valve opened
3/12/2011	9:19:30 PM	Helium MFC set to  0.000000
3/12/2011	9:19:30 PM	H2 MFC set to  0.000000
3/12/2011	9:19:30 PM	BCl3 MFC set to  0.000000
3/12/2011	9:19:30 PM	PHl3 MFC set to  0.000000
3/12/2011	9:19:30 PM	SiCl4 MFC set to  0.000000
3/12/2011	9:19:30 PM	Bypass solenoid MFC set to  0.000000
3/12/2011	9:19:30 PM	Tube furnace set to 0
3/12/2011	9:20:30 PM	H2 valve closed
3/12/2011	9:20:30 PM	BCl3 valve closed
3/12/2011	9:20:30 PM	PH3 valve closed
3/12/2011	9:20:30 PM	SiCl4 pre valve closed
3/12/2011	9:20:30 PM	SiCl4 post valve closed
3/12/2011	9:20:30 PM	Bubbler valve closed
3/12/2011	9:20:30 PM	Helium valve opened
3/12/2011	9:20:30 PM	Main Vac valve opened
3/12/2011	9:20:30 PM	Bypass valve opened
3/12/2011	9:20:30 PM	Helium MFC set to  100.000000
3/12/2011	9:20:30 PM	H2 MFC set to  0.000000
3/12/2011	9:20:30 PM	BCl3 MFC set to  0.000000
3/12/2011	9:20:30 PM	PHl3 MFC set to  0.000000
3/12/2011	9:20:30 PM	SiCl4 MFC set to  0.000000
3/12/2011	9:20:30 PM	Bypass solenoid MFC set to  0.000000
3/12/2011	9:20:30 PM	Tube furnace set to 0
3/12/2011	9:21:30 PM	Helium valve closed
3/12/2011	9:21:30 PM	H2 valve closed
3/12/2011	9:21:30 PM	BCl3 valve closed
3/12/2011	9:21:30 PM	PH3 valve closed
3/12/2011	9:21:30 PM	SiCl4 pre valve closed
3/12/2011	9:21:30 PM	SiCl4 post valve closed
3/12/2011	9:21:30 PM	Bubbler valve closed
3/12/2011	9:21:30 PM	Main Vac valve opened
3/12/2011	9:21:30 PM	Bypass valve opened
3/12/2011	9:21:30 PM	Helium MFC set to  0.000000
3/12/2011	9:21:30 PM	H2 MFC set to  0.000000
3/12/2011	9:21:30 PM	BCl3 MFC set to  0.000000
3/12/2011	9:21:30 PM	PHl3 MFC set to  0.000000
3/12/2011	9:21:30 PM	SiCl4 MFC set to  0.000000
3/12/2011	9:21:30 PM	Bypass solenoid MFC set to  0.000000
3/12/2011	9:21:30 PM	Tube furnace set to 0
3/12/2011	9:22:30 PM	H2 valve closed
3/12/2011	9:22:30 PM	BCl3 valve closed
3/12/2011	9:22:30 PM	PH3 valve closed
3/12/2011	9:22:30 PM	SiCl4 pre valve closed
3/12/2011	9:22:30 PM	SiCl4 post valve closed
3/12/2011	9:22:30 PM	Bubbler valve closed
3/12/2011	9:22:30 PM	Helium valve opened
3/12/2011	9:22:30 PM	Main Vac valve opened
3/12/2011	9:22:30 PM	Bypass valve opened
3/12/2011	9:22:30 PM	Helium MFC set to  100.000000
3/12/2011	9:22:30 PM	H2 MFC set to  0.000000
3/12/2011	9:22:30 PM	BCl3 MFC set to  0.000000
3/12/2011	9:22:30 PM	PHl3 MFC set to  0.000000
3/12/2011	9:22:30 PM	SiCl4 MFC set to  0.000000
3/12/2011	9:22:30 PM	Bypass solenoid MFC set to  0.000000
3/12/2011	9:22:31 PM	Tube furnace set to 0
3/12/2011	9:23:31 PM	Helium valve closed
3/12/2011	9:23:31 PM	H2 valve closed
3/12/2011	9:23:31 PM	BCl3 valve closed
3/12/2011	9:23:31 PM	PH3 valve closed
3/12/2011	9:23:31 PM	SiCl4 pre valve closed
3/12/2011	9:23:31 PM	SiCl4 post valve closed
3/12/2011	9:23:31 PM	Bubbler valve closed
3/12/2011	9:23:31 PM	Main Vac valve opened
3/12/2011	9:23:31 PM	Bypass valve opened
3/12/2011	9:23:31 PM	Helium MFC set to  0.000000
3/12/2011	9:23:31 PM	H2 MFC set to  0.000000
3/12/2011	9:23:31 PM	BCl3 MFC set to  0.000000
3/12/2011	9:23:31 PM	PHl3 MFC set to  0.000000
3/12/2011	9:23:31 PM	SiCl4 MFC set to  0.000000
3/12/2011	9:23:31 PM	Bypass solenoid MFC set to  0.000000
3/12/2011	9:23:31 PM	Tube furnace set to 0
3/12/2011	9:24:31 PM	H2 valve closed
3/12/2011	9:24:31 PM	BCl3 valve closed
3/12/2011	9:24:31 PM	PH3 valve closed
3/12/2011	9:24:31 PM	SiCl4 pre valve closed
3/12/2011	9:24:31 PM	SiCl4 post valve closed
3/12/2011	9:24:31 PM	Bubbler valve closed
3/12/2011	9:24:31 PM	Helium valve opened
3/12/2011	9:24:31 PM	Main Vac valve opened
3/12/2011	9:24:31 PM	Bypass valve opened
3/12/2011	9:24:31 PM	Helium MFC set to  100.000000
3/12/2011	9:24:31 PM	H2 MFC set to  0.000000
3/12/2011	9:24:31 PM	BCl3 MFC set to  0.000000
3/12/2011	9:24:31 PM	PHl3 MFC set to  0.000000
3/12/2011	9:24:31 PM	SiCl4 MFC set to  0.000000
3/12/2011	9:24:31 PM	Bypass solenoid MFC set to  0.000000
3/12/2011	9:24:31 PM	Tube furnace set to 0
3/12/2011	9:25:31 PM	Helium valve closed
3/12/2011	9:25:31 PM	H2 valve closed
3/12/2011	9:25:31 PM	BCl3 valve closed
3/12/2011	9:25:31 PM	PH3 valve closed
3/12/2011	9:25:31 PM	SiCl4 pre valve closed
3/12/2011	9:25:31 PM	SiCl4 post valve closed
3/12/2011	9:25:31 PM	Bubbler valve closed
3/12/2011	9:25:31 PM	Main Vac valve opened
3/12/2011	9:25:31 PM	Bypass valve opened
3/12/2011	9:25:31 PM	Helium MFC set to  0.000000
3/12/2011	9:25:31 PM	H2 MFC set to  0.000000
3/12/2011	9:25:31 PM	BCl3 MFC set to  0.000000
3/12/2011	9:25:31 PM	PHl3 MFC set to  0.000000
3/12/2011	9:25:31 PM	SiCl4 MFC set to  0.000000
3/12/2011	9:25:31 PM	Bypass solenoid MFC set to  0.000000
3/12/2011	9:25:31 PM	Tube furnace set to 0
3/12/2011	9:26:31 PM	H2 valve closed
3/12/2011	9:26:31 PM	BCl3 valve closed
3/12/2011	9:26:31 PM	PH3 valve closed
3/12/2011	9:26:31 PM	SiCl4 pre valve closed
3/12/2011	9:26:31 PM	SiCl4 post valve closed
3/12/2011	9:26:31 PM	Bubbler valve closed
3/12/2011	9:26:31 PM	Helium valve opened
3/12/2011	9:26:31 PM	Main Vac valve opened
3/12/2011	9:26:31 PM	Bypass valve opened
3/12/2011	9:26:31 PM	Helium MFC set to  100.000000
3/12/2011	9:26:31 PM	H2 MFC set to  0.000000
3/12/2011	9:26:31 PM	BCl3 MFC set to  0.000000
3/12/2011	9:26:31 PM	PHl3 MFC set to  0.000000
3/12/2011	9:26:31 PM	SiCl4 MFC set to  0.000000
3/12/2011	9:26:31 PM	Bypass solenoid MFC set to  0.000000
3/12/2011	9:26:31 PM	Tube furnace set to 0
3/12/2011	9:27:31 PM	Helium valve closed
3/12/2011	9:27:31 PM	H2 valve closed
3/12/2011	9:27:31 PM	BCl3 valve closed
3/12/2011	9:27:31 PM	PH3 valve closed
3/12/2011	9:27:31 PM	SiCl4 pre valve closed
3/12/2011	9:27:31 PM	SiCl4 post valve closed
3/12/2011	9:27:31 PM	Bubbler valve closed
3/12/2011	9:27:31 PM	Main Vac valve opened
3/12/2011	9:27:31 PM	Bypass valve opened
3/12/2011	9:27:31 PM	Helium MFC set to  0.000000
3/12/2011	9:27:31 PM	H2 MFC set to  0.000000
3/12/2011	9:27:31 PM	BCl3 MFC set to  0.000000
3/12/2011	9:27:31 PM	PHl3 MFC set to  0.000000
3/12/2011	9:27:31 PM	SiCl4 MFC set to  0.000000
3/12/2011	9:27:31 PM	Bypass solenoid MFC set to  0.000000
3/12/2011	9:27:32 PM	Tube furnace set to 0
3/12/2011	9:28:32 PM	H2 valve closed
3/12/2011	9:28:32 PM	BCl3 valve closed
3/12/2011	9:28:32 PM	PH3 valve closed
3/12/2011	9:28:32 PM	SiCl4 pre valve closed
3/12/2011	9:28:32 PM	SiCl4 post valve closed
3/12/2011	9:28:32 PM	Bubbler valve closed
3/12/2011	9:28:32 PM	Helium valve opened
3/12/2011	9:28:32 PM	Main Vac valve opened
3/12/2011	9:28:32 PM	Bypass valve opened
3/12/2011	9:28:32 PM	Helium MFC set to  100.000000
3/12/2011	9:28:32 PM	H2 MFC set to  0.000000
3/12/2011	9:28:32 PM	BCl3 MFC set to  0.000000
3/12/2011	9:28:32 PM	PHl3 MFC set to  0.000000
3/12/2011	9:28:32 PM	SiCl4 MFC set to  0.000000
3/12/2011	9:28:32 PM	Bypass solenoid MFC set to  0.000000
3/12/2011	9:28:32 PM	Tube furnace set to 0
3/12/2011	9:29:32 PM	Helium valve closed
3/12/2011	9:29:32 PM	H2 valve closed
3/12/2011	9:29:32 PM	BCl3 valve closed
3/12/2011	9:29:32 PM	PH3 valve closed
3/12/2011	9:29:32 PM	SiCl4 pre valve closed
3/12/2011	9:29:32 PM	SiCl4 post valve closed
3/12/2011	9:29:32 PM	Bubbler valve closed
3/12/2011	9:29:32 PM	Main Vac valve opened
3/12/2011	9:29:32 PM	Bypass valve opened
3/12/2011	9:29:32 PM	Helium MFC set to  0.000000
3/12/2011	9:29:32 PM	H2 MFC set to  0.000000
3/12/2011	9:29:32 PM	BCl3 MFC set to  0.000000
3/12/2011	9:29:32 PM	PHl3 MFC set to  0.000000
3/12/2011	9:29:32 PM	SiCl4 MFC set to  0.000000
3/12/2011	9:29:32 PM	Bypass solenoid MFC set to  0.000000
3/12/2011	9:29:32 PM	Tube furnace set to 0
3/12/2011	9:29:33 PM	Run finished at 9:29 PM
3/12/2011	9:29:33 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
3/12/2011	9:35:59 PM	Helium MFC set to  50.000000
3/12/2011	9:36:00 PM	Helium valve opened
3/12/2011	9:36:25 PM	Helium MFC set to  0.000000
3/12/2011	9:36:25 PM	Helium valve closed
3/12/2011	9:37:11 PM	Recipe started at 9:37 PM
3/12/2011	9:37:11 PM	Helium valve closed
3/12/2011	9:37:11 PM	BCl3 valve closed
3/12/2011	9:37:11 PM	PH3 valve closed
3/12/2011	9:37:11 PM	SiCl4 pre valve closed
3/12/2011	9:37:11 PM	SiCl4 post valve closed
3/12/2011	9:37:11 PM	Main Vac valve closed
3/12/2011	9:37:11 PM	Bypass valve closed
3/12/2011	9:37:11 PM	Bubbler valve closed
3/12/2011	9:37:11 PM	H2 valve opened
3/12/2011	9:37:11 PM	Helium MFC set to  0.000000
3/12/2011	9:37:11 PM	H2 MFC set to  500.000000
3/12/2011	9:37:11 PM	BCl3 MFC set to  0.000000
3/12/2011	9:37:11 PM	PHl3 MFC set to  0.000000
3/12/2011	9:37:11 PM	SiCl4 MFC set to  0.000000
3/12/2011	9:37:11 PM	Bypass solenoid MFC set to  0.000000
3/12/2011	9:37:11 PM	Tube furnace set to 0
3/12/2011	9:38:31 PM	Helium valve closed
3/12/2011	9:38:31 PM	BCl3 valve closed
3/12/2011	9:38:31 PM	PH3 valve closed
3/12/2011	9:38:31 PM	SiCl4 pre valve closed
3/12/2011	9:38:31 PM	SiCl4 post valve closed
3/12/2011	9:38:31 PM	Main Vac valve closed
3/12/2011	9:38:31 PM	Bypass valve closed
3/12/2011	9:38:31 PM	H2 valve opened
3/12/2011	9:38:31 PM	Bubbler valve opened
3/12/2011	9:38:31 PM	Helium MFC set to  0.000000
3/12/2011	9:38:31 PM	H2 MFC set to  500.000000
3/12/2011	9:38:31 PM	BCl3 MFC set to  0.000000
3/12/2011	9:38:31 PM	PHl3 MFC set to  0.000000
3/12/2011	9:38:31 PM	SiCl4 MFC set to  0.000000
3/12/2011	9:38:31 PM	Bypass solenoid MFC set to  0.000000
3/12/2011	9:38:31 PM	Tube furnace set to 1000
3/12/2011	9:58:31 PM	Helium valve closed
3/12/2011	9:58:31 PM	PH3 valve closed
3/12/2011	9:58:31 PM	Main Vac valve closed
3/12/2011	9:58:31 PM	Bypass valve closed
3/12/2011	9:58:31 PM	H2 valve opened
3/12/2011	9:58:31 PM	BCl3 valve opened
3/12/2011	9:58:31 PM	SiCl4 pre valve opened
3/12/2011	9:58:31 PM	SiCl4 post valve opened
3/12/2011	9:58:31 PM	Bubbler valve opened
3/12/2011	9:58:31 PM	Helium MFC set to  0.000000
3/12/2011	9:58:31 PM	H2 MFC set to  500.000000
3/12/2011	9:58:31 PM	BCl3 MFC set to  3.000000
3/12/2011	9:58:31 PM	PHl3 MFC set to  0.000000
3/12/2011	9:58:31 PM	SiCl4 MFC set to  50.000000
3/12/2011	9:58:31 PM	Bypass solenoid MFC set to  0.000000
3/12/2011	9:58:31 PM	Tube furnace set to 1000
3/12/2011	10:18:31 PM	H2 valve closed
3/12/2011	10:18:31 PM	BCl3 valve closed
3/12/2011	10:18:31 PM	PH3 valve closed
3/12/2011	10:18:31 PM	SiCl4 pre valve closed
3/12/2011	10:18:31 PM	SiCl4 post valve closed
3/12/2011	10:18:31 PM	Main Vac valve closed
3/12/2011	10:18:31 PM	Bypass valve closed
3/12/2011	10:18:31 PM	Helium valve opened
3/12/2011	10:18:31 PM	Bubbler valve opened
3/12/2011	10:18:31 PM	Helium MFC set to  500.000000
3/12/2011	10:18:31 PM	H2 MFC set to  0.000000
3/12/2011	10:18:31 PM	BCl3 MFC set to  0.000000
3/12/2011	10:18:31 PM	PHl3 MFC set to  0.000000
3/12/2011	10:18:31 PM	SiCl4 MFC set to  0.000000
3/12/2011	10:18:31 PM	Bypass solenoid MFC set to  0.000000
3/12/2011	10:18:31 PM	Tube furnace set to 0
3/12/2011	10:38:31 PM	Helium valve closed
3/12/2011	10:38:31 PM	H2 valve closed
3/12/2011	10:38:31 PM	BCl3 valve closed
3/12/2011	10:38:31 PM	PH3 valve closed
3/12/2011	10:38:31 PM	SiCl4 pre valve closed
3/12/2011	10:38:31 PM	SiCl4 post valve closed
3/12/2011	10:38:31 PM	Main Vac valve closed
3/12/2011	10:38:31 PM	Bypass valve closed
3/12/2011	10:38:31 PM	Bubbler valve closed
3/12/2011	10:38:31 PM	Helium MFC set to  0.000000
3/12/2011	10:38:31 PM	H2 MFC set to  0.000000
3/12/2011	10:38:31 PM	BCl3 MFC set to  0.000000
3/12/2011	10:38:31 PM	PHl3 MFC set to  0.000000
3/12/2011	10:38:31 PM	SiCl4 MFC set to  0.000000
3/12/2011	10:38:31 PM	Bypass solenoid MFC set to  0.000000
3/12/2011	10:38:31 PM	Tube furnace set to 0
3/12/2011	10:38:32 PM	Run finished at 10:38 PM
3/12/2011	10:58:00 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/12/2011	10:58:00 PM	Recipe started at 10:58 PM
3/12/2011	10:58:01 PM	H2 valve closed
3/12/2011	10:58:01 PM	BCl3 valve closed
3/12/2011	10:58:01 PM	PH3 valve closed
3/12/2011	10:58:01 PM	SiCl4 pre valve closed
3/12/2011	10:58:01 PM	SiCl4 post valve closed
3/12/2011	10:58:01 PM	Main Vac valve closed
3/12/2011	10:58:01 PM	Bypass valve closed
3/12/2011	10:58:01 PM	Bubbler valve closed
3/12/2011	10:58:01 PM	Helium valve opened
3/12/2011	10:58:01 PM	Helium MFC set to  500.000000
3/12/2011	10:58:01 PM	H2 MFC set to  0.000000
3/12/2011	10:58:01 PM	BCl3 MFC set to  0.000000
3/12/2011	10:58:01 PM	PHl3 MFC set to  0.000000
3/12/2011	10:58:01 PM	SiCl4 MFC set to  0.000000
3/12/2011	10:58:01 PM	Bypass solenoid MFC set to  0.000000
3/12/2011	10:58:01 PM	Tube furnace set to 0
3/12/2011	10:58:07 PM	Helium valve closed
3/12/2011	10:58:07 PM	H2 valve closed
3/12/2011	10:58:07 PM	BCl3 valve closed
3/12/2011	10:58:07 PM	PH3 valve closed
3/12/2011	10:58:07 PM	SiCl4 pre valve closed
3/12/2011	10:58:07 PM	SiCl4 post valve closed
3/12/2011	10:58:07 PM	Main Vac valve closed
3/12/2011	10:58:07 PM	Bypass valve closed
3/12/2011	10:58:07 PM	Bubbler valve closed
3/12/2011	10:58:07 PM	Helium MFC set to  0.000000
3/12/2011	10:58:07 PM	H2 MFC set to  0.000000
3/12/2011	10:58:07 PM	BCl3 MFC set to  0.000000
3/12/2011	10:58:07 PM	PHl3 MFC set to  0.000000
3/12/2011	10:58:07 PM	SiCl4 MFC set to  0.000000
3/12/2011	10:58:07 PM	Bypass solenoid MFC set to  0.000000
3/12/2011	10:58:07 PM	Tube furnace set to 0
3/12/2011	10:58:08 PM	Run finished at 10:58 PM
3/12/2011	10:58:08 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/12/2011	11:04:58 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/12/2011	11:04:58 PM	Recipe started at 11:04 PM
3/12/2011	11:04:58 PM	Helium valve closed
3/12/2011	11:04:58 PM	H2 valve closed
3/12/2011	11:04:58 PM	BCl3 valve closed
3/12/2011	11:04:58 PM	PH3 valve closed
3/12/2011	11:04:58 PM	SiCl4 pre valve closed
3/12/2011	11:04:58 PM	SiCl4 post valve closed
3/12/2011	11:04:58 PM	Main Vac valve closed
3/12/2011	11:04:58 PM	Bubbler valve closed
3/12/2011	11:04:58 PM	Bypass valve opened
3/12/2011	11:04:58 PM	Helium MFC set to  0.000000
3/12/2011	11:04:58 PM	H2 MFC set to  0.000000
3/12/2011	11:04:58 PM	BCl3 MFC set to  0.000000
3/12/2011	11:04:58 PM	PHl3 MFC set to  0.000000
3/12/2011	11:04:58 PM	SiCl4 MFC set to  0.000000
3/12/2011	11:04:58 PM	Bypass solenoid MFC set to  0.000000
3/12/2011	11:04:58 PM	Tube furnace set to 0
3/12/2011	11:05:31 PM	Helium valve closed
3/12/2011	11:05:31 PM	H2 valve closed
3/12/2011	11:05:31 PM	BCl3 valve closed
3/12/2011	11:05:31 PM	PH3 valve closed
3/12/2011	11:05:31 PM	SiCl4 pre valve closed
3/12/2011	11:05:31 PM	SiCl4 post valve closed
3/12/2011	11:05:31 PM	Bubbler valve closed
3/12/2011	11:05:31 PM	Main Vac valve opened
3/12/2011	11:05:31 PM	Bypass valve opened
3/12/2011	11:05:31 PM	Helium MFC set to  0.000000
3/12/2011	11:05:31 PM	H2 MFC set to  0.000000
3/12/2011	11:05:31 PM	BCl3 MFC set to  0.000000
3/12/2011	11:05:31 PM	PHl3 MFC set to  0.000000
3/12/2011	11:05:31 PM	SiCl4 MFC set to  0.000000
3/12/2011	11:05:31 PM	Bypass solenoid MFC set to  0.000000
3/12/2011	11:05:31 PM	Tube furnace set to 0
3/12/2011	11:05:31 PM	Run finished at 11:05 PM
3/12/2011	11:05:31 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/12/2011	11:05:54 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
3/12/2011	11:06:07 PM	Recipe started at 11:06 PM
3/12/2011	11:06:08 PM	Helium valve closed
3/12/2011	11:06:08 PM	H2 valve closed
3/12/2011	11:06:08 PM	BCl3 valve closed
3/12/2011	11:06:08 PM	PH3 valve closed
3/12/2011	11:06:08 PM	SiCl4 pre valve closed
3/12/2011	11:06:08 PM	SiCl4 post valve closed
3/12/2011	11:06:08 PM	Main Vac valve closed
3/12/2011	11:06:08 PM	Bubbler valve closed
3/12/2011	11:06:08 PM	Bypass valve opened
3/12/2011	11:06:08 PM	Helium MFC set to  0.000000
3/12/2011	11:06:08 PM	H2 MFC set to  0.000000
3/12/2011	11:06:08 PM	BCl3 MFC set to  0.000000
3/12/2011	11:06:08 PM	PHl3 MFC set to  0.000000
3/12/2011	11:06:08 PM	SiCl4 MFC set to  0.000000
3/12/2011	11:06:08 PM	Bypass solenoid MFC set to  0.000000
3/12/2011	11:06:08 PM	Tube furnace set to 0
3/12/2011	11:06:08 PM	Helium valve closed
3/12/2011	11:06:08 PM	H2 valve closed
3/12/2011	11:06:08 PM	BCl3 valve closed
3/12/2011	11:06:08 PM	PH3 valve closed
3/12/2011	11:06:08 PM	SiCl4 pre valve closed
3/12/2011	11:06:08 PM	SiCl4 post valve closed
3/12/2011	11:06:08 PM	Bubbler valve closed
3/12/2011	11:06:08 PM	Main Vac valve opened
3/12/2011	11:06:08 PM	Bypass valve opened
3/12/2011	11:06:08 PM	Helium MFC set to  0.000000
3/12/2011	11:06:08 PM	H2 MFC set to  0.000000
3/12/2011	11:06:08 PM	BCl3 MFC set to  0.000000
3/12/2011	11:06:08 PM	PHl3 MFC set to  0.000000
3/12/2011	11:06:08 PM	SiCl4 MFC set to  0.000000
3/12/2011	11:06:08 PM	Bypass solenoid MFC set to  0.000000
3/12/2011	11:06:08 PM	Tube furnace set to 0
3/12/2011	11:07:08 PM	H2 valve closed
3/12/2011	11:07:08 PM	BCl3 valve closed
3/12/2011	11:07:08 PM	PH3 valve closed
3/12/2011	11:07:08 PM	SiCl4 pre valve closed
3/12/2011	11:07:08 PM	SiCl4 post valve closed
3/12/2011	11:07:08 PM	Bubbler valve closed
3/12/2011	11:07:08 PM	Helium valve opened
3/12/2011	11:07:08 PM	Main Vac valve opened
3/12/2011	11:07:08 PM	Bypass valve opened
3/12/2011	11:07:08 PM	Helium MFC set to  100.000000
3/12/2011	11:07:08 PM	H2 MFC set to  0.000000
3/12/2011	11:07:08 PM	BCl3 MFC set to  0.000000
3/12/2011	11:07:08 PM	PHl3 MFC set to  0.000000
3/12/2011	11:07:08 PM	SiCl4 MFC set to  0.000000
3/12/2011	11:07:08 PM	Bypass solenoid MFC set to  0.000000
3/12/2011	11:07:08 PM	Tube furnace set to 0
3/12/2011	11:08:08 PM	Helium valve closed
3/12/2011	11:08:08 PM	H2 valve closed
3/12/2011	11:08:08 PM	BCl3 valve closed
3/12/2011	11:08:08 PM	PH3 valve closed
3/12/2011	11:08:08 PM	SiCl4 pre valve closed
3/12/2011	11:08:08 PM	SiCl4 post valve closed
3/12/2011	11:08:08 PM	Bubbler valve closed
3/12/2011	11:08:08 PM	Main Vac valve opened
3/12/2011	11:08:08 PM	Bypass valve opened
3/12/2011	11:08:08 PM	Helium MFC set to  0.000000
3/12/2011	11:08:08 PM	H2 MFC set to  0.000000
3/12/2011	11:08:08 PM	BCl3 MFC set to  0.000000
3/12/2011	11:08:08 PM	PHl3 MFC set to  0.000000
3/12/2011	11:08:08 PM	SiCl4 MFC set to  0.000000
3/12/2011	11:08:08 PM	Bypass solenoid MFC set to  0.000000
3/12/2011	11:08:09 PM	Tube furnace set to 0
3/12/2011	11:09:09 PM	H2 valve closed
3/12/2011	11:09:09 PM	BCl3 valve closed
3/12/2011	11:09:09 PM	PH3 valve closed
3/12/2011	11:09:09 PM	SiCl4 pre valve closed
3/12/2011	11:09:09 PM	SiCl4 post valve closed
3/12/2011	11:09:09 PM	Bubbler valve closed
3/12/2011	11:09:09 PM	Helium valve opened
3/12/2011	11:09:09 PM	Main Vac valve opened
3/12/2011	11:09:09 PM	Bypass valve opened
3/12/2011	11:09:09 PM	Helium MFC set to  100.000000
3/12/2011	11:09:09 PM	H2 MFC set to  0.000000
3/12/2011	11:09:09 PM	BCl3 MFC set to  0.000000
3/12/2011	11:09:09 PM	PHl3 MFC set to  0.000000
3/12/2011	11:09:09 PM	SiCl4 MFC set to  0.000000
3/12/2011	11:09:09 PM	Bypass solenoid MFC set to  0.000000
3/12/2011	11:09:09 PM	Tube furnace set to 0
3/12/2011	11:10:09 PM	Helium valve closed
3/12/2011	11:10:09 PM	H2 valve closed
3/12/2011	11:10:09 PM	BCl3 valve closed
3/12/2011	11:10:09 PM	PH3 valve closed
3/12/2011	11:10:09 PM	SiCl4 pre valve closed
3/12/2011	11:10:09 PM	SiCl4 post valve closed
3/12/2011	11:10:09 PM	Bubbler valve closed
3/12/2011	11:10:09 PM	Main Vac valve opened
3/12/2011	11:10:09 PM	Bypass valve opened
3/12/2011	11:10:09 PM	Helium MFC set to  0.000000
3/12/2011	11:10:09 PM	H2 MFC set to  0.000000
3/12/2011	11:10:09 PM	BCl3 MFC set to  0.000000
3/12/2011	11:10:09 PM	PHl3 MFC set to  0.000000
3/12/2011	11:10:09 PM	SiCl4 MFC set to  0.000000
3/12/2011	11:10:09 PM	Bypass solenoid MFC set to  0.000000
3/12/2011	11:10:09 PM	Tube furnace set to 0
3/12/2011	11:11:09 PM	H2 valve closed
3/12/2011	11:11:09 PM	BCl3 valve closed
3/12/2011	11:11:09 PM	PH3 valve closed
3/12/2011	11:11:09 PM	SiCl4 pre valve closed
3/12/2011	11:11:09 PM	SiCl4 post valve closed
3/12/2011	11:11:09 PM	Bubbler valve closed
3/12/2011	11:11:09 PM	Helium valve opened
3/12/2011	11:11:09 PM	Main Vac valve opened
3/12/2011	11:11:09 PM	Bypass valve opened
3/12/2011	11:11:09 PM	Helium MFC set to  100.000000
3/12/2011	11:11:09 PM	H2 MFC set to  0.000000
3/12/2011	11:11:09 PM	BCl3 MFC set to  0.000000
3/12/2011	11:11:09 PM	PHl3 MFC set to  0.000000
3/12/2011	11:11:09 PM	SiCl4 MFC set to  0.000000
3/12/2011	11:11:09 PM	Bypass solenoid MFC set to  0.000000
3/12/2011	11:11:09 PM	Tube furnace set to 0
3/12/2011	11:12:09 PM	Helium valve closed
3/12/2011	11:12:09 PM	H2 valve closed
3/12/2011	11:12:09 PM	BCl3 valve closed
3/12/2011	11:12:09 PM	PH3 valve closed
3/12/2011	11:12:09 PM	SiCl4 pre valve closed
3/12/2011	11:12:09 PM	SiCl4 post valve closed
3/12/2011	11:12:09 PM	Bubbler valve closed
3/12/2011	11:12:09 PM	Main Vac valve opened
3/12/2011	11:12:09 PM	Bypass valve opened
3/12/2011	11:12:09 PM	Helium MFC set to  0.000000
3/12/2011	11:12:09 PM	H2 MFC set to  0.000000
3/12/2011	11:12:09 PM	BCl3 MFC set to  0.000000
3/12/2011	11:12:09 PM	PHl3 MFC set to  0.000000
3/12/2011	11:12:09 PM	SiCl4 MFC set to  0.000000
3/12/2011	11:12:09 PM	Bypass solenoid MFC set to  0.000000
3/12/2011	11:12:09 PM	Tube furnace set to 0
3/12/2011	11:13:09 PM	H2 valve closed
3/12/2011	11:13:09 PM	BCl3 valve closed
3/12/2011	11:13:09 PM	PH3 valve closed
3/12/2011	11:13:09 PM	SiCl4 pre valve closed
3/12/2011	11:13:09 PM	SiCl4 post valve closed
3/12/2011	11:13:09 PM	Bubbler valve closed
3/12/2011	11:13:09 PM	Helium valve opened
3/12/2011	11:13:09 PM	Main Vac valve opened
3/12/2011	11:13:09 PM	Bypass valve opened
3/12/2011	11:13:09 PM	Helium MFC set to  100.000000
3/12/2011	11:13:09 PM	H2 MFC set to  0.000000
3/12/2011	11:13:09 PM	BCl3 MFC set to  0.000000
3/12/2011	11:13:09 PM	PHl3 MFC set to  0.000000
3/12/2011	11:13:09 PM	SiCl4 MFC set to  0.000000
3/12/2011	11:13:09 PM	Bypass solenoid MFC set to  0.000000
3/12/2011	11:13:10 PM	Tube furnace set to 0
3/12/2011	11:14:10 PM	Helium valve closed
3/12/2011	11:14:10 PM	H2 valve closed
3/12/2011	11:14:10 PM	BCl3 valve closed
3/12/2011	11:14:10 PM	PH3 valve closed
3/12/2011	11:14:10 PM	SiCl4 pre valve closed
3/12/2011	11:14:10 PM	SiCl4 post valve closed
3/12/2011	11:14:10 PM	Bubbler valve closed
3/12/2011	11:14:10 PM	Main Vac valve opened
3/12/2011	11:14:10 PM	Bypass valve opened
3/12/2011	11:14:10 PM	Helium MFC set to  0.000000
3/12/2011	11:14:10 PM	H2 MFC set to  0.000000
3/12/2011	11:14:10 PM	BCl3 MFC set to  0.000000
3/12/2011	11:14:10 PM	PHl3 MFC set to  0.000000
3/12/2011	11:14:10 PM	SiCl4 MFC set to  0.000000
3/12/2011	11:14:10 PM	Bypass solenoid MFC set to  0.000000
3/12/2011	11:14:10 PM	Tube furnace set to 0
3/12/2011	11:15:10 PM	H2 valve closed
3/12/2011	11:15:10 PM	BCl3 valve closed
3/12/2011	11:15:10 PM	PH3 valve closed
3/12/2011	11:15:10 PM	SiCl4 pre valve closed
3/12/2011	11:15:10 PM	SiCl4 post valve closed
3/12/2011	11:15:10 PM	Bubbler valve closed
3/12/2011	11:15:10 PM	Helium valve opened
3/12/2011	11:15:10 PM	Main Vac valve opened
3/12/2011	11:15:10 PM	Bypass valve opened
3/12/2011	11:15:10 PM	Helium MFC set to  100.000000
3/12/2011	11:15:10 PM	H2 MFC set to  0.000000
3/12/2011	11:15:10 PM	BCl3 MFC set to  0.000000
3/12/2011	11:15:10 PM	PHl3 MFC set to  0.000000
3/12/2011	11:15:10 PM	SiCl4 MFC set to  0.000000
3/12/2011	11:15:10 PM	Bypass solenoid MFC set to  0.000000
3/12/2011	11:15:10 PM	Tube furnace set to 0
3/12/2011	11:16:10 PM	Helium valve closed
3/12/2011	11:16:10 PM	H2 valve closed
3/12/2011	11:16:10 PM	BCl3 valve closed
3/12/2011	11:16:10 PM	PH3 valve closed
3/12/2011	11:16:10 PM	SiCl4 pre valve closed
3/12/2011	11:16:10 PM	SiCl4 post valve closed
3/12/2011	11:16:10 PM	Bubbler valve closed
3/12/2011	11:16:10 PM	Main Vac valve opened
3/12/2011	11:16:10 PM	Bypass valve opened
3/12/2011	11:16:10 PM	Helium MFC set to  0.000000
3/12/2011	11:16:10 PM	H2 MFC set to  0.000000
3/12/2011	11:16:10 PM	BCl3 MFC set to  0.000000
3/12/2011	11:16:10 PM	PHl3 MFC set to  0.000000
3/12/2011	11:16:10 PM	SiCl4 MFC set to  0.000000
3/12/2011	11:16:10 PM	Bypass solenoid MFC set to  0.000000
3/12/2011	11:16:10 PM	Tube furnace set to 0
3/12/2011	11:17:10 PM	H2 valve closed
3/12/2011	11:17:10 PM	BCl3 valve closed
3/12/2011	11:17:10 PM	PH3 valve closed
3/12/2011	11:17:10 PM	SiCl4 pre valve closed
3/12/2011	11:17:10 PM	SiCl4 post valve closed
3/12/2011	11:17:10 PM	Bubbler valve closed
3/12/2011	11:17:10 PM	Helium valve opened
3/12/2011	11:17:10 PM	Main Vac valve opened
3/12/2011	11:17:10 PM	Bypass valve opened
3/12/2011	11:17:10 PM	Helium MFC set to  100.000000
3/12/2011	11:17:10 PM	H2 MFC set to  0.000000
3/12/2011	11:17:10 PM	BCl3 MFC set to  0.000000
3/12/2011	11:17:10 PM	PHl3 MFC set to  0.000000
3/12/2011	11:17:10 PM	SiCl4 MFC set to  0.000000
3/12/2011	11:17:10 PM	Bypass solenoid MFC set to  0.000000
3/12/2011	11:17:10 PM	Tube furnace set to 0
3/12/2011	11:18:10 PM	Helium valve closed
3/12/2011	11:18:10 PM	H2 valve closed
3/12/2011	11:18:10 PM	BCl3 valve closed
3/12/2011	11:18:10 PM	PH3 valve closed
3/12/2011	11:18:10 PM	SiCl4 pre valve closed
3/12/2011	11:18:10 PM	SiCl4 post valve closed
3/12/2011	11:18:10 PM	Bubbler valve closed
3/12/2011	11:18:10 PM	Main Vac valve opened
3/12/2011	11:18:10 PM	Bypass valve opened
3/12/2011	11:18:10 PM	Helium MFC set to  0.000000
3/12/2011	11:18:10 PM	H2 MFC set to  0.000000
3/12/2011	11:18:10 PM	BCl3 MFC set to  0.000000
3/12/2011	11:18:10 PM	PHl3 MFC set to  0.000000
3/12/2011	11:18:10 PM	SiCl4 MFC set to  0.000000
3/12/2011	11:18:10 PM	Bypass solenoid MFC set to  0.000000
3/12/2011	11:18:11 PM	Tube furnace set to 0
3/12/2011	11:19:11 PM	H2 valve closed
3/12/2011	11:19:11 PM	BCl3 valve closed
3/12/2011	11:19:11 PM	PH3 valve closed
3/12/2011	11:19:11 PM	SiCl4 pre valve closed
3/12/2011	11:19:11 PM	SiCl4 post valve closed
3/12/2011	11:19:11 PM	Bubbler valve closed
3/12/2011	11:19:11 PM	Helium valve opened
3/12/2011	11:19:11 PM	Main Vac valve opened
3/12/2011	11:19:11 PM	Bypass valve opened
3/12/2011	11:19:11 PM	Helium MFC set to  100.000000
3/12/2011	11:19:11 PM	H2 MFC set to  0.000000
3/12/2011	11:19:11 PM	BCl3 MFC set to  0.000000
3/12/2011	11:19:11 PM	PHl3 MFC set to  0.000000
3/12/2011	11:19:11 PM	SiCl4 MFC set to  0.000000
3/12/2011	11:19:11 PM	Bypass solenoid MFC set to  0.000000
3/12/2011	11:19:11 PM	Tube furnace set to 0
3/12/2011	11:20:11 PM	Helium valve closed
3/12/2011	11:20:11 PM	H2 valve closed
3/12/2011	11:20:11 PM	BCl3 valve closed
3/12/2011	11:20:11 PM	PH3 valve closed
3/12/2011	11:20:11 PM	SiCl4 pre valve closed
3/12/2011	11:20:11 PM	SiCl4 post valve closed
3/12/2011	11:20:11 PM	Bubbler valve closed
3/12/2011	11:20:11 PM	Main Vac valve opened
3/12/2011	11:20:11 PM	Bypass valve opened
3/12/2011	11:20:11 PM	Helium MFC set to  0.000000
3/12/2011	11:20:11 PM	H2 MFC set to  0.000000
3/12/2011	11:20:11 PM	BCl3 MFC set to  0.000000
3/12/2011	11:20:11 PM	PHl3 MFC set to  0.000000
3/12/2011	11:20:11 PM	SiCl4 MFC set to  0.000000
3/12/2011	11:20:11 PM	Bypass solenoid MFC set to  0.000000
3/12/2011	11:20:11 PM	Tube furnace set to 0
3/12/2011	11:21:11 PM	H2 valve closed
3/12/2011	11:21:11 PM	BCl3 valve closed
3/12/2011	11:21:11 PM	PH3 valve closed
3/12/2011	11:21:11 PM	SiCl4 pre valve closed
3/12/2011	11:21:11 PM	SiCl4 post valve closed
3/12/2011	11:21:11 PM	Bubbler valve closed
3/12/2011	11:21:11 PM	Helium valve opened
3/12/2011	11:21:11 PM	Main Vac valve opened
3/12/2011	11:21:11 PM	Bypass valve opened
3/12/2011	11:21:11 PM	Helium MFC set to  100.000000
3/12/2011	11:21:11 PM	H2 MFC set to  0.000000
3/12/2011	11:21:11 PM	BCl3 MFC set to  0.000000
3/12/2011	11:21:11 PM	PHl3 MFC set to  0.000000
3/12/2011	11:21:11 PM	SiCl4 MFC set to  0.000000
3/12/2011	11:21:11 PM	Bypass solenoid MFC set to  0.000000
3/12/2011	11:21:11 PM	Tube furnace set to 0
3/12/2011	11:22:11 PM	Helium valve closed
3/12/2011	11:22:11 PM	H2 valve closed
3/12/2011	11:22:11 PM	BCl3 valve closed
3/12/2011	11:22:11 PM	PH3 valve closed
3/12/2011	11:22:11 PM	SiCl4 pre valve closed
3/12/2011	11:22:11 PM	SiCl4 post valve closed
3/12/2011	11:22:11 PM	Bubbler valve closed
3/12/2011	11:22:11 PM	Main Vac valve opened
3/12/2011	11:22:11 PM	Bypass valve opened
3/12/2011	11:22:11 PM	Helium MFC set to  0.000000
3/12/2011	11:22:11 PM	H2 MFC set to  0.000000
3/12/2011	11:22:11 PM	BCl3 MFC set to  0.000000
3/12/2011	11:22:11 PM	PHl3 MFC set to  0.000000
3/12/2011	11:22:11 PM	SiCl4 MFC set to  0.000000
3/12/2011	11:22:11 PM	Bypass solenoid MFC set to  0.000000
3/12/2011	11:22:11 PM	Tube furnace set to 0
3/12/2011	11:23:11 PM	H2 valve closed
3/12/2011	11:23:11 PM	BCl3 valve closed
3/12/2011	11:23:11 PM	PH3 valve closed
3/12/2011	11:23:11 PM	SiCl4 pre valve closed
3/12/2011	11:23:11 PM	SiCl4 post valve closed
3/12/2011	11:23:11 PM	Bubbler valve closed
3/12/2011	11:23:11 PM	Helium valve opened
3/12/2011	11:23:11 PM	Main Vac valve opened
3/12/2011	11:23:11 PM	Bypass valve opened
3/12/2011	11:23:11 PM	Helium MFC set to  100.000000
3/12/2011	11:23:11 PM	H2 MFC set to  0.000000
3/12/2011	11:23:11 PM	BCl3 MFC set to  0.000000
3/12/2011	11:23:11 PM	PHl3 MFC set to  0.000000
3/12/2011	11:23:11 PM	SiCl4 MFC set to  0.000000
3/12/2011	11:23:11 PM	Bypass solenoid MFC set to  0.000000
3/12/2011	11:23:12 PM	Tube furnace set to 0
3/12/2011	11:24:12 PM	Helium valve closed
3/12/2011	11:24:12 PM	H2 valve closed
3/12/2011	11:24:12 PM	BCl3 valve closed
3/12/2011	11:24:12 PM	PH3 valve closed
3/12/2011	11:24:12 PM	SiCl4 pre valve closed
3/12/2011	11:24:12 PM	SiCl4 post valve closed
3/12/2011	11:24:12 PM	Bubbler valve closed
3/12/2011	11:24:12 PM	Main Vac valve opened
3/12/2011	11:24:12 PM	Bypass valve opened
3/12/2011	11:24:12 PM	Helium MFC set to  0.000000
3/12/2011	11:24:12 PM	H2 MFC set to  0.000000
3/12/2011	11:24:12 PM	BCl3 MFC set to  0.000000
3/12/2011	11:24:12 PM	PHl3 MFC set to  0.000000
3/12/2011	11:24:12 PM	SiCl4 MFC set to  0.000000
3/12/2011	11:24:12 PM	Bypass solenoid MFC set to  0.000000
3/12/2011	11:24:12 PM	Tube furnace set to 0
3/12/2011	11:25:12 PM	H2 valve closed
3/12/2011	11:25:12 PM	BCl3 valve closed
3/12/2011	11:25:12 PM	PH3 valve closed
3/12/2011	11:25:12 PM	SiCl4 pre valve closed
3/12/2011	11:25:12 PM	SiCl4 post valve closed
3/12/2011	11:25:12 PM	Bubbler valve closed
3/12/2011	11:25:12 PM	Helium valve opened
3/12/2011	11:25:12 PM	Main Vac valve opened
3/12/2011	11:25:12 PM	Bypass valve opened
3/12/2011	11:25:12 PM	Helium MFC set to  100.000000
3/12/2011	11:25:12 PM	H2 MFC set to  0.000000
3/12/2011	11:25:12 PM	BCl3 MFC set to  0.000000
3/12/2011	11:25:12 PM	PHl3 MFC set to  0.000000
3/12/2011	11:25:12 PM	SiCl4 MFC set to  0.000000
3/12/2011	11:25:12 PM	Bypass solenoid MFC set to  0.000000
3/12/2011	11:25:12 PM	Tube furnace set to 0
3/12/2011	11:26:12 PM	Helium valve closed
3/12/2011	11:26:12 PM	H2 valve closed
3/12/2011	11:26:12 PM	BCl3 valve closed
3/12/2011	11:26:12 PM	PH3 valve closed
3/12/2011	11:26:12 PM	SiCl4 pre valve closed
3/12/2011	11:26:12 PM	SiCl4 post valve closed
3/12/2011	11:26:12 PM	Bubbler valve closed
3/12/2011	11:26:12 PM	Main Vac valve opened
3/12/2011	11:26:12 PM	Bypass valve opened
3/12/2011	11:26:12 PM	Helium MFC set to  0.000000
3/12/2011	11:26:12 PM	H2 MFC set to  0.000000
3/12/2011	11:26:12 PM	BCl3 MFC set to  0.000000
3/12/2011	11:26:12 PM	PHl3 MFC set to  0.000000
3/12/2011	11:26:12 PM	SiCl4 MFC set to  0.000000
3/12/2011	11:26:12 PM	Bypass solenoid MFC set to  0.000000
3/12/2011	11:26:12 PM	Tube furnace set to 0
3/12/2011	11:26:13 PM	Run finished at 11:26 PM
3/12/2011	11:26:13 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
3/12/2011	11:30:58 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
3/12/2011	11:30:59 PM	Recipe started at 11:30 PM
3/12/2011	11:30:59 PM	Helium valve closed
3/12/2011	11:30:59 PM	H2 valve closed
3/12/2011	11:30:59 PM	BCl3 valve closed
3/12/2011	11:30:59 PM	PH3 valve closed
3/12/2011	11:30:59 PM	SiCl4 pre valve closed
3/12/2011	11:30:59 PM	SiCl4 post valve closed
3/12/2011	11:30:59 PM	Main Vac valve closed
3/12/2011	11:30:59 PM	Bypass valve closed
3/12/2011	11:30:59 PM	Bubbler valve closed
3/12/2011	11:30:59 PM	Helium MFC set to  0.000000
3/12/2011	11:30:59 PM	H2 MFC set to  0.000000
3/12/2011	11:30:59 PM	BCl3 MFC set to  0.000000
3/12/2011	11:30:59 PM	PHl3 MFC set to  0.000000
3/12/2011	11:30:59 PM	SiCl4 MFC set to  0.000000
3/12/2011	11:30:59 PM	Bypass solenoid MFC set to  0.000000
3/12/2011	11:30:59 PM	Tube furnace set to 0
3/12/2011	11:30:59 PM	Run finished at 11:30 PM
3/12/2011	11:30:59 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
3/12/2011	11:31:15 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/12/2011	11:31:15 PM	Recipe started at 11:31 PM
3/12/2011	11:31:15 PM	Helium valve closed
3/12/2011	11:31:15 PM	H2 valve closed
3/12/2011	11:31:15 PM	BCl3 valve closed
3/12/2011	11:31:15 PM	PH3 valve closed
3/12/2011	11:31:15 PM	SiCl4 pre valve closed
3/12/2011	11:31:15 PM	SiCl4 post valve closed
3/12/2011	11:31:15 PM	Main Vac valve closed
3/12/2011	11:31:15 PM	Bubbler valve closed
3/12/2011	11:31:15 PM	Bypass valve opened
3/12/2011	11:31:15 PM	Helium MFC set to  0.000000
3/12/2011	11:31:15 PM	H2 MFC set to  0.000000
3/12/2011	11:31:15 PM	BCl3 MFC set to  0.000000
3/12/2011	11:31:15 PM	PHl3 MFC set to  0.000000
3/12/2011	11:31:15 PM	SiCl4 MFC set to  0.000000
3/12/2011	11:31:15 PM	Bypass solenoid MFC set to  0.000000
3/12/2011	11:31:15 PM	Tube furnace set to 0
3/12/2011	11:31:16 PM	Helium valve closed
3/12/2011	11:31:16 PM	H2 valve closed
3/12/2011	11:31:16 PM	BCl3 valve closed
3/12/2011	11:31:16 PM	PH3 valve closed
3/12/2011	11:31:16 PM	SiCl4 pre valve closed
3/12/2011	11:31:16 PM	SiCl4 post valve closed
3/12/2011	11:31:16 PM	Bubbler valve closed
3/12/2011	11:31:16 PM	Main Vac valve opened
3/12/2011	11:31:16 PM	Bypass valve opened
3/12/2011	11:31:16 PM	Helium MFC set to  0.000000
3/12/2011	11:31:16 PM	H2 MFC set to  0.000000
3/12/2011	11:31:16 PM	BCl3 MFC set to  0.000000
3/12/2011	11:31:16 PM	PHl3 MFC set to  0.000000
3/12/2011	11:31:16 PM	SiCl4 MFC set to  0.000000
3/12/2011	11:31:16 PM	Bypass solenoid MFC set to  0.000000
3/12/2011	11:31:16 PM	Tube furnace set to 0
3/12/2011	11:31:16 PM	Run finished at 11:31 PM
3/12/2011	11:31:16 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/12/2011	11:31:25 PM	Helium MFC set to  100.000000
3/12/2011	11:31:26 PM	Helium valve opened
3/12/2011	11:31:27 PM	Helium valve closed
3/12/2011	11:31:27 PM	Helium valve opened
3/12/2011	11:32:29 PM	Helium MFC set to  0.000000
3/12/2011	11:32:30 PM	Helium valve closed
3/12/2011	11:33:11 PM	Recipe started at 11:33 PM
3/12/2011	11:33:11 PM	Helium valve closed
3/12/2011	11:33:11 PM	BCl3 valve closed
3/12/2011	11:33:11 PM	PH3 valve closed
3/12/2011	11:33:11 PM	SiCl4 pre valve closed
3/12/2011	11:33:11 PM	SiCl4 post valve closed
3/12/2011	11:33:11 PM	Main Vac valve closed
3/12/2011	11:33:11 PM	Bypass valve closed
3/12/2011	11:33:11 PM	Bubbler valve closed
3/12/2011	11:33:11 PM	H2 valve opened
3/12/2011	11:33:11 PM	Helium MFC set to  0.000000
3/12/2011	11:33:11 PM	H2 MFC set to  500.000000
3/12/2011	11:33:11 PM	BCl3 MFC set to  0.000000
3/12/2011	11:33:11 PM	PHl3 MFC set to  0.000000
3/12/2011	11:33:11 PM	SiCl4 MFC set to  0.000000
3/12/2011	11:33:11 PM	Bypass solenoid MFC set to  0.000000
3/12/2011	11:33:11 PM	Tube furnace set to 0
3/12/2011	11:34:30 PM	Helium valve closed
3/12/2011	11:34:30 PM	BCl3 valve closed
3/12/2011	11:34:30 PM	PH3 valve closed
3/12/2011	11:34:30 PM	SiCl4 pre valve closed
3/12/2011	11:34:30 PM	SiCl4 post valve closed
3/12/2011	11:34:30 PM	Main Vac valve closed
3/12/2011	11:34:30 PM	Bypass valve closed
3/12/2011	11:34:30 PM	H2 valve opened
3/12/2011	11:34:30 PM	Bubbler valve opened
3/12/2011	11:34:30 PM	Helium MFC set to  0.000000
3/12/2011	11:34:30 PM	H2 MFC set to  500.000000
3/12/2011	11:34:30 PM	BCl3 MFC set to  0.000000
3/12/2011	11:34:30 PM	PHl3 MFC set to  0.000000
3/12/2011	11:34:30 PM	SiCl4 MFC set to  0.000000
3/12/2011	11:34:30 PM	Bypass solenoid MFC set to  0.000000
3/12/2011	11:34:30 PM	Tube furnace set to 1000
3/12/2011	11:54:30 PM	Helium valve closed
3/12/2011	11:54:30 PM	PH3 valve closed
3/12/2011	11:54:30 PM	Main Vac valve closed
3/12/2011	11:54:30 PM	Bypass valve closed
3/12/2011	11:54:30 PM	H2 valve opened
3/12/2011	11:54:30 PM	BCl3 valve opened
3/12/2011	11:54:30 PM	SiCl4 pre valve opened
3/12/2011	11:54:30 PM	SiCl4 post valve opened
3/12/2011	11:54:30 PM	Bubbler valve opened
3/12/2011	11:54:30 PM	Helium MFC set to  0.000000
3/12/2011	11:54:30 PM	H2 MFC set to  500.000000
3/12/2011	11:54:30 PM	BCl3 MFC set to  3.000000
3/12/2011	11:54:30 PM	PHl3 MFC set to  0.000000
3/12/2011	11:54:30 PM	SiCl4 MFC set to  75.000000
3/12/2011	11:54:30 PM	Bypass solenoid MFC set to  0.000000
3/12/2011	11:54:30 PM	Tube furnace set to 1000
